Effects of substrate properties and sputtering methods on self-formation of Ag particles on the Ag-Mo(Zr) alloy films

被引：2

作者：

Sun, Haoliang ^{[1
,2
]}

Lian, Xinxin ^{[1
]}

Huang, Xiaoxue ^{[1
]}

Hui, David ^{[3
]}

Wang, Guangxin ^{[1
]}

机构：

[1] Henan Univ Sci & Technol, Sch Mat Sci & Engn, Luoyang 471023, Peoples R China

[2] Collaborat Innovat Ctr Nonferrous Met Henan Prov, Luoyang 471003, Peoples R China

[3] Univ New Orleans, Dept Mech Engn, New Orleans, LA 70148 USA

来源：

NANOTECHNOLOGY REVIEWS | 2020年 / 9卷 / 01期

基金：

中国国家自然科学基金;

关键词：

Ag-Mo(Zr) alloy film; substrate; thermal stress; MICROSTRUCTURE; PERFORMANCE; STRESS; SILVER; OXIDATION; COATINGS; GROWTH; GOLD; TA; ZR;

D O I：

10.1515/ntrev-2020-0077

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

This article studies two different sputtering methods for depositing Ag-Mo and Ag-Zr alloy films on single crystal silicon (Si), flexible polyimide (PI) and soda-lime glass substrates. The phase structure and the surface morphology of the Ag-Mo(Zr) alloy films were characterized by XRD, SEM and EDS. The effects of substrate properties and sputtering methods on the self-grown Ag particles on the Ag-Mo(Zr) alloy films were investigated. As the result of the experiment, nanoscale Ag particles were formed on the surface of Ag-Mo(Zr) alloy films. However, the size and the number of self-formed Ag particles on the Ag-Mo(Zr) alloy film on the PI substrate are significantly different from that on the Si substrate and glass substrate. This outcome is closely related to the different thermal stress evolution behaviors of the alloy films on different substrates during annealing.

引用

页码：990 / 997

页数：8

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