Interferometric measurement of a concave, φ-polynomial, Zernike mirror

被引:74
作者
Fuerschbach, Kyle [1 ]
Thompson, Kevin P. [1 ,2 ]
Rolland, Jannick P. [1 ]
机构
[1] Univ Rochester, Inst Opt, Rochester, NY 14627 USA
[2] Synopsys Inc, Pittsford, NY 14534 USA
基金
美国国家科学基金会;
关键词
COMPUTER-GENERATED HOLOGRAMS;
D O I
10.1364/OL.39.000018
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We report on the surface figure measurement of a freeform, phi-polynomial (Zernike) mirror for use in an off-axis, reflective imaging system. The measurement utilizes an interferometric null configuration that is a combination of subsystems each addressing a specific aberration type, namely, spherical aberration, astigmatism, and coma. (C) 2013 Optical Society of America
引用
收藏
页码:18 / 21
页数:4
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