Ablation characteristics of aluminum oxide and nitride ceramics during femtosecond laser micromachining

被引：92

作者：

Kim, Sung Hoon ^{[1
]}

Sohn, Ik-Bu ^{[2
]}

Jeong, Sungho ^{[1
]}

机构：

[1] Gwangju Inst Sci & Technol, Sch Informat & Mechatron, Kwangju 500712, South Korea

[2] Gwangju Inst Sci & Technol, Adv Photon Res Inst, Kwangju 500712, South Korea

来源：

APPLIED SURFACE SCIENCE | 2009年 / 255卷 / 24期

关键词：

Femtosecond laser ablation; Ceramic; Alumina; Aluminum nitride; THRESHOLDS; SILICON; GROOVES; SINGLE; DAMAGE;

D O I：

10.1016/j.apsusc.2009.04.058

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Femtosecond laser ablation of aluminum oxide (Al2O3) and aluminum nitride (AlN) ceramics was performed under normal atmospheric conditions (lambda = 785 nm, tau(p) = 185 fs, repetition rate = 1 kHz), and threshold laser fluencies for single- and multi-pulse ablation were determined. The ablation characteristics of the two ceramics showed similar trends except for surface morphologies, which revealed virtually no melting in Al2O3 but clear evidence of melting for AlN. Based on subsequent X-ray photoelectron spectroscopy (XPS) analyses, the chemistry of these ceramics appeared to remain the same before and after femtosecond laser ablation. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：9717 / 9720

页数：4

共 23 条

[1] Surface damage threshold and structuring of dielectrics using femtosecond laser pulses: the role of incubation [J].

Ashkenasi, D ;

Lorenz, M ;

Stoian, R ;

Rosenfeld, A .

APPLIED SURFACE SCIENCE, 1999, 150 (1-4) :101-106

[2] Ultrashort pulse laser ablation of polycarbonate and polymethylmethacrylate [J].

Baudach, S ;

Bonse, J ;

Krüger, J ;

Kautek, W .

APPLIED SURFACE SCIENCE, 2000, 154 :555-560

[3] Ultrashort-pulse laser ablation of indium phosphide in air [J].

Bonse, J ;

Wrobel, JM ;

Krüger, J ;

Kautek, W .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2001, 72 (01) :89-94

[4] Femtosecond laser ablation of silicon-modification thresholds and morphology [J].

Bonse, J ;

Baudach, S ;

Krüger, J ;

Kautek, W ;

Lenzner, M .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2002, 74 (01) :19-25

[5] Femtosecond laser micromachining of grooves in indium phosphide [J].

Borowiec, A ;

Haugen, HK .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2004, 79 (03) :521-529

[6] Femtosecond laser micromachining of grooves in silicon with 800 nm pulses [J].

Crawford, THR ;

Borowiec, A ;

Haugen, HK .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2005, 80 (08) :1717-1724

[7] Femtosecond laser processing of nitride-based thin films to improve their tribological performance [J].

Dumitru, G ;

Romano, V ;

Gerbig, Y ;

Weber, HP ;

Haefke, H .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2005, 80 (02) :283-287

[8] Ablation characteristics of cubic-boron nitride ceramic with femtosecond and picosecond laser pulses [J].

Hirayama, Y ;

Obara, M .

JOURNAL OF APPLIED PHYSICS, 2001, 90 (12) :6447-6450

[9] LASER-INDUCED DAMAGE ON SINGLE-CRYSTAL METAL-SURFACES [J].

JEE, Y ;

BECKER, MF ;

WALSER, RM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1988, 5 (03) :648-659

[10]

JEE Y, 1988, NAT BUR STAND US SPE, V746, P236

← 1 2 3 →