Magnetron sputtered Dy2O3 with chromium and copper contents for antireflective thin films with enhanced absorption

被引:9
|
作者
Ramay, Shahid M. [1 ]
Mahmood, Asif [2 ]
Ghaithan, Hamid M. [3 ]
Al-Zayed, Nasser S. [1 ]
Aslam, Adnan [3 ]
Murtaza, Abdullah [3 ]
Ahmad, Nisar [3 ]
Siddiqi, Saadat A. [4 ]
Saleem, Murtaza [5 ]
机构
[1] King Saud Univ Riyadh, Coll Sci, Phys & Astron Dept, Riyadh, Saudi Arabia
[2] King Saud Univ Riyadh, Coll Engn, Chem Engn Dept, Riyadh, Saudi Arabia
[3] Univ Lahore, Dept Phys, 1 KM Raiwind Rd, Lahore, Pakistan
[4] COMSATS Inst Informat Technol, Interdisciplinary Res Ctr Biomed Mat, Def Rd,Off Raiwind Rd, Lahore, Pakistan
[5] LUMS, Dept Phys, SBASSE, Lahore 54792, Pakistan
关键词
Thin films; Dysprosium oxide; X-ray diffraction; FESEM; Optical properties; Anti-reflective; CHEMICAL-VAPOR-DEPOSITION; OPTICAL-PROPERTIES; DYSPROSIUM;
D O I
10.1016/j.jre.2018.12.002
中图分类号
O69 [应用化学];
学科分类号
081704 ;
摘要
Dy2O3 is a rare earth oxide having a number of advanced applications in various fields including protective or antireflective coatings. Main objective of this novel research work is to check the effect of Cr and Cu addition on different properties of Dy2O3 and achievement of antireflective thin films with enhanced absorption. Thin films of these materials were deposited using DC magnetron with reactive cosputtering. XRD studies reveals the crystalline nature of thin films having Dy2O3 (222) reflection in all samples with Cr2O3 (116) and CuO (111) reflections in Cr and Cu containing compositions. Field emission scanning electron microscopy demonstrates the homogeneous deposition of thin films with uniform shape, size and distribution of grains. Refractive index, extinction coefficient and absorption coefficient significantly increase while optical reflectance decreases with Cr and Cu mediation corroborating an improved antireflective mechanism. The imaginary part of dielectric constant is found to increase slightly with low tangent loss for Cr containing composition considered favorable for energy storage applications. (C) 2019 Chinese Society of Rare Earths. Published by Elsevier B.V. All rights reserved.
引用
收藏
页码:989 / 994
页数:6
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