Young's Modulus and Poisson's Ratio Characterization of Tungsten Thin Films via Laser Ultrasound

被引：21
|
作者：
Gruenwald, E. [1 ]
Nuster, R. [2 ]
Treml, R. [3 ]
Kiener, D. [3 ]
Paltauf, G. [2 ]
Brunner, R. [1 ]
机构：
[1] Mat Ctr Leoben Forsch GmbH MCL, Leoben, Austria
[2] Karl Franzens Univ Graz, Graz, Austria
[3] Univ Leoben, Leoben, Austria
来源：
MATERIALS TODAY-PROCEEDINGS | 2015年 / 2卷 / 08期
关键词：
Laser Ultrasound; Thin Films; Tungsten Layer; Mechanical Properties; Young's Modulus; Poisson's Ratio; SURFACE ACOUSTIC-WAVES; MECHANICAL-PROPERTIES; ELASTIC PROPERTIES; NANOINDENTATION; DIAMOND;
D O I：
10.1016/j.matpr.2015.09.015
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The non-destructive examination of microstructural properties of thin films is of consistent significance in microelectronic applications and simulations. Here, a laser ultrasonic (LUS) method is used to determine Young's modulus E and Poisson's ratio v of thin films deposited on silicon substrates. In particular, we determine the longitudinal and transversal sound velocity of a surface acoustic wave (SAW) in a 695 nm tungsten layer on a silicon (100) substrate, from which E and v are derived. The setup uses laser pulses to generate SAWs on the sample of interest. By detecting the SAWs with an optical beam deflection method, it is possible to determine the frequency-dependent phase velocity. Fitting a theoretical model to the experimentally evaluated dispersion curve, the longitudinal and transversal sound velocities of the thin film are derived. (C) 2015 Elsevier Ltd. All rights reserved.
引用
收藏
页码：4289 / 4294
页数：6
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