Effects of grating heights on highly efficient unibond SOI waveguide grating couplers

被引：66
作者：
Ang, TW [1 ]
Reed, GT
Vonsovici, A
Evans, AGR
Routley, PR
Josey, MR
机构：
[1] Univ Surrey, Sch Elect Engn Informat Technol & Math, Guildford GU2 5XH, Surrey, England
[2] Univ Southampton, Dept Elect & Comp Engn, Southampton SO17 1BJ, Hants, England
来源：
IEEE PHOTONICS TECHNOLOGY LETTERS | 2000年 / 12卷 / 01期
关键词：
electron-beam lithography; grating couplers; integrated optics; silicon-on-insulator; silicon rectangular gratings; unibond;
D O I：
10.1109/68.817493
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this letter, we report the first successful experimental evaluation of the effect of grating height upon the output efficiency of grating couplers as predicted using perturbation theory. In addition, we have also produced a grating with an output efficiency of 70%, which is the highest efficiency yet reported for a silicon-on-insulator waveguide grating coupler.
引用
收藏
页码：59 / 61
页数：3
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