Effect of heat treatment on the structural properties of tungsten carbide coatings deposited by RF magnetron sputtering

被引：2

作者：

Zaidi, B. ^{[1
]}

Khechba, M. ^{[2
]}

Shekhar, C. ^{[3
]}

Saouane, I. ^{[4
]}

Li, R. ^{[5
]}

机构：

[1] Univ Badji Mokhtar, Fac Sci, Dept Phys, Lab Semicond, BP 12, Annaba 23000, Algeria

[2] Univ Constantine 1, Fac Sci Exactes, Dept Phys, Lab Couches Minces & Interface, Constantine, Algeria

[3] Amity Univ, Dept Appl Phys, Gurgaon 122413, India

[4] Univ Constantine 1, Lab Phys Energet, Constantine, Algeria

[5] Louisiana State Univ, Dept Chem Engn, Baton Rouge, LA 70803 USA

来源：

INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY | 2017年 / 89卷 / 5-8期

关键词：

Heat treatments; RF magnetron sputtering; Tungsten carbides; Steel (XC70); Coating; CHEMICAL-VAPOR-DEPOSITION; FILMS; FABRICATION; COMPONENTS; TARGET;

D O I：

10.1007/s00170-016-9171-6

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A systematic study on the effect of heat treatment on the structural properties of tungsten carbides coatings deposited by RF magnetron sputtering on steel substrate (XC70) was carried out. These coatings were subjected to heat treatment in vacuum at various temperatures ranging from 500 to 1000 A degrees C for 25 min. Structural analysis of the as-deposited and heat-treated coatings was performed by means of X-ray diffraction (XRD) and optical microscopy. The XRD analyses indicated the presence of nanocrystalline grains with (222) preferential orientation. The grain size varied from 8 to 15 nm. The presence of two different phases WC and W2C was observed in the coatings heat treated at 1000 A degrees C. The effect of the annealing temperature on the surface morphology of the coatings was studied using optical microscopy.

引用

页码：1837 / 1840

页数：4

共 17 条

[11] Synthesis and characterization of tungsten oxynitride films deposited by reactive magnetron sputtering [J].