共 32 条
[11]
Keceli Sema Askin, 2004, TURK J ENG ENV SCI, V28, P49
[18]
Ionized sputter deposition using an extremely high plasma density pulsed magnetron discharge
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
2000, 18 (04)
:1533-1537