A scanning acoustic microscope based on picosecond ultrasonics

被引:10
作者
Che, S. [1 ]
Guduru, P. R. [2 ]
Nurmikko, A. V. [1 ,2 ]
Maris, H. J. [1 ,2 ]
机构
[1] Brown Univ, Dept Phys, Providence, RI 02912 USA
[2] Brown Univ, Sch Engn, Providence, RI 02912 USA
关键词
Acoustic microscope; Acoustic lens; ABSORPTION;
D O I
10.1016/j.ultras.2014.02.010
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
We report on the development of a new type of scanning acoustic microscope. We use a femtosecond light pulse to generate a short sound pulse, and then focus this sound onto the sample by means of a specially designed and microfabricated acoustic lens of radius a few microns. The sound travels to the sample through a thin layer of water. The sound reflected from the sample is collected by the lens and then passes through a monolithically integrated optical resonant cavity. The induced change in the properties of this cavity are measured using a time-delayed probe light pulse. We describe some of the challenges involved in the construction and operation of this high-precision metrology apparatus and present some preliminary results. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码:153 / 159
页数:7
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