Accuracy improvement of miniaturized machine tool: Geometric error modeling and compensation

被引：84
作者：
Lee, Jae Ha
Liu, Yu
Yang, Seung-Han [1 ]
机构：
[1] Kyungpook Natl Univ, Sch Mech Engn, Taegu 702701, South Korea
[2] Kyungpook Natl Univ, Grad Sch Mech Engn, Taegu 702701, South Korea
来源：
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE | 2006年 / 46卷 / 12-13期
基金：
新加坡国家研究基金会;
关键词：
multi-DOF measurement; error modeling; volumetric error model synthesis; recursive compensation; miniaturized machine tool;
D O I：
10.1016/j.ijmachtools.2005.09.004
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A novel capacitance-sensor based multi-degree-of-freedom (DOF) measurement system has been developed for measuring geometric errors of a miniaturized machine tool (mMT) overcoming the size limitations. In the present work five geometric error components of a three-axis mMT are measured simultaneously along each axis and the squareness errors are determined by the slopes of straightness error profiles. Least-squares fitting method is used to represent the analytical models of geometric errors. A kinematic chain consisting of various structural members of mMT is introduced to establish the positional relationships among its coordinate frames. Based on this kinematic chain a general volumetric error model has been developed to synthesize all geometric error components of a miniaturized machine tool. Then, a recursive compensation method is proposed to achieve error compensation efficiently. Test results show that the positioning accuracy of miniaturized machine tool has been improved with compensation. (C) 2005 Elsevier Ltd. All rights reserved.
引用
收藏
页码：1508 / 1516
页数：9
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