Origin of the spatial resolution in atom probe microscopy

被引：73

作者：

Gault, Baptiste ^{[1
,2
]}

Moody, Michael P. ^{[1
]}

de Geuser, Frederic ^{[3
]}

Haley, Daniel ^{[1
]}

Stephenson, Leigh T. ^{[1
]}

Ringer, Simon P. ^{[1
]}

机构：

[1] Univ Sydney, Australian Key Ctr Microscopy & Microanal, Sydney, NSW 2006, Australia

[2] Univ Oxford, Dept Mat, Oxford OX1 3PH, England

[3] UJF, CNRS, SIMaP, Grenoble INP, F-38402 St Martin Dheres, France

来源：

APPLIED PHYSICS LETTERS | 2009年 / 95卷 / 03期

基金：

澳大利亚研究理事会;

关键词：

scanning probe microscopy; FIELD EVAPORATION; TOMOGRAPHY; RECONSTRUCTION;

D O I：

10.1063/1.3182351

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Atom-probe microscopy offers unprecedented insights on the subnanometer structure and chemistry of materials in three dimensions. The actual spatial resolution achievable is however still an uncertain parameter, as no comprehensive study has been undertaken to unveil the physics underpinning how key parameters impact the performance. Here, we present a comprehensive investigation of the in-depth and lateral resolution of the technique. We discuss methods to estimate the resolution and show a resolution better than 20 pm in-depth. Models to support our results were developed and are discussed in the present letter.

引用

页数：3

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