A 1.5-V-supplied CMOS ASIC for the actuation of an electrostatic micromotor

被引：9
作者：
Favrat, P
Paratte, L
Ballan, H
Declercq, MJ
deRooij, NF
机构：
[1] SWISS FED INST TECHNOL, DEPT MICROTECHNOL, MICROSYST INST, CH-1015 LAUSANNE, SWITZERLAND
[2] SWISS FED INST TECHNOL, INST MICROTECHNOL, DEPT MICROBIOL, CH-1015 LAUSANNE, SWITZERLAND
[3] SWISS FED INST TECHNOL, DEPT ELECT ENGN, CH-1015 LAUSANNE, SWITZERLAND
来源：
IEEE-ASME TRANSACTIONS ON MECHATRONICS | 1997年 / 2卷 / 03期
关键词：
DC-DC converter; electrostatic; high voltage; MEMS; micromotor;
D O I：
10.1109/3516.622967
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
The use of electrostatic forces in micromechanical systems is well known, but quite high voltages are needed to produce usable forces, In this perspective paper, a 1.5-V battery-supplied integrated circuit able to drive an electrostatic micromotor is presented. The application-specific integrated circuit (ASIC) can output signals up to 80 V, with low-voltage controlling signals, It is especially designed for portable (wristwatch-like) applications, High voltage can be produced by either switching or charge-pumping power supplies.
引用
收藏
页码：153 / 160
页数：8
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