Oxygen Effects on a He/O2 Plasma Jet at Atmospheric Pressure

被引:11
作者
Wang, Shouguo [1 ]
Wan, Jun [1 ]
机构
[1] Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
关键词
Atmospheric pressure; discharge characteristics; oxygen effect; plasma jet;
D O I
10.1109/TPS.2009.2012861
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
A plasma jet has been developed that operates using RF power and produces a stable homogeneous discharge of He/O-2 at atmospheric pressure. An optical emission spectroscopy technique was used to observe the electronically excited species at the point 10 mm downstream from the nozzle generated by the He/O-2 plasma jet, and the discharge characteristics for the gas mixture of He/O-2 were studied with a current probe and a voltage probe. The results indicate that there is a relative optimum fraction of O-2 in the He/O-2 gas mixture from 0.5% to 1.5% for the relative larger intensity of the characteristic atomic oxygen line at 777 nm, the root-mean-square (rms) current and ruts voltage of the discharge are also more sensitive to oxygen content than to total gas flow.
引用
收藏
页码:551 / 554
页数:4
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