共 9 条
Oxygen Effects on a He/O2 Plasma Jet at Atmospheric Pressure
被引:11
作者:

Wang, Shouguo
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机构:
Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China

Wan, Jun
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h-index: 0
机构:
Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
机构:
[1] Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
关键词:
Atmospheric pressure;
discharge characteristics;
oxygen effect;
plasma jet;
D O I:
10.1109/TPS.2009.2012861
中图分类号:
O35 [流体力学];
O53 [等离子体物理学];
学科分类号:
070204 ;
080103 ;
080704 ;
摘要:
A plasma jet has been developed that operates using RF power and produces a stable homogeneous discharge of He/O-2 at atmospheric pressure. An optical emission spectroscopy technique was used to observe the electronically excited species at the point 10 mm downstream from the nozzle generated by the He/O-2 plasma jet, and the discharge characteristics for the gas mixture of He/O-2 were studied with a current probe and a voltage probe. The results indicate that there is a relative optimum fraction of O-2 in the He/O-2 gas mixture from 0.5% to 1.5% for the relative larger intensity of the characteristic atomic oxygen line at 777 nm, the root-mean-square (rms) current and ruts voltage of the discharge are also more sensitive to oxygen content than to total gas flow.
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收藏
页码:551 / 554
页数:4
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