共 39 条
[1]
The 2017 Plasma Roadmap: Low temperature plasma science and technology
[J].
Adamovich, I.
;
Baalrud, S. D.
;
Bogaerts, A.
;
Bruggeman, P. J.
;
Cappelli, M.
;
Colombo, V.
;
Czarnetzki, U.
;
Ebert, U.
;
Eden, J. G.
;
Favia, P.
;
Graves, D. B.
;
Hamaguchi, S.
;
Hieftje, G.
;
Hori, M.
;
Kaganovich, I. D.
;
Kortshagen, U.
;
Kushner, M. J.
;
Mason, N. J.
;
Mazouffre, S.
;
Thagard, S. Mededovic
;
Metelmann, H-R
;
Mizuno, A.
;
Moreau, E.
;
Murphy, A. B.
;
Niemira, B. A.
;
Oehrlein, G. S.
;
Petrovic, Z. Lj
;
Pitchford, L. C.
;
Pu, Y-K
;
Rauf, S.
;
Sakai, O.
;
Samukawa, S.
;
Starikovskaia, S.
;
Tennyson, J.
;
Terashima, K.
;
Turner, M. M.
;
van de Sanden, M. C. M.
;
Vardelle, A.
.
JOURNAL OF PHYSICS D-APPLIED PHYSICS,
2017, 50 (32)

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Baalrud, S. D.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Iowa, Dept Phys & Astron, Iowa City, IA 52242 USA Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

Bogaerts, A.
论文数: 0 引用数: 0
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机构:
Univ Antwerp, Univ 1, Dept Chem, Res Grp PLASMANT, B-2610 Antwerp, Belgium Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

Bruggeman, P. J.
论文数: 0 引用数: 0
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机构:
Univ Minnesota, Dept Mech Engn, Minneapolis, MN 55455 USA Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

Cappelli, M.
论文数: 0 引用数: 0
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机构:
Stanford Univ, Stanford Plasma Phys Lab, Stanford, CA 94305 USA Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

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Czarnetzki, U.
论文数: 0 引用数: 0
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机构:
Ruhr Univ Bochum, Inst Plasma & Atom Phys, D-44780 Bochum, Germany Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

Ebert, U.
论文数: 0 引用数: 0
h-index: 0
机构:
Grp Multiscale Dynam, Centrum Wiskunde Informat CWI, Box 94079, NL-1090GB Amsterdam, Netherlands
Eindhoven Univ Technol, Dept Appl Phys, Box 513, Eindhoven, Netherlands Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

Eden, J. G.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Illinois, Dept Elect & Comp Engn, Urbana, IL 61801 USA Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

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Graves, D. B.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Calif Berkeley, Chem & Biomol Engn, 201 Gilman, Berkeley, CA 94720 USA Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

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Hieftje, G.
论文数: 0 引用数: 0
h-index: 0
机构:
Indiana Univ, Dept Chem, Bloomington, IN 47405 USA Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

Hori, M.
论文数: 0 引用数: 0
h-index: 0
机构:
Nagoya Univ, Plasma Nanotechnol Res Ctr, Nagoya, Aichi 4648603, Japan Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

Kaganovich, I. D.
论文数: 0 引用数: 0
h-index: 0
机构:
Princeton Univ, Princeton Plasma Phys Lab, Princeton, NJ 08543 USA Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

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Kushner, M. J.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Michigan, Elect Engn & Comp Sci, 1301 Beal Ave, Ann Arbor, MI 48109 USA Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

Mason, N. J.
论文数: 0 引用数: 0
h-index: 0
机构:
Open Univ, Dept Phys Sci, Milton Keynes MK7 6AA, Bucks, England Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

Mazouffre, S.
论文数: 0 引用数: 0
h-index: 0
机构:
CNRS Univ Orleans, ICARE, 1C Ave Recherche Sci, F-45071 Orleans, France Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

Thagard, S. Mededovic
论文数: 0 引用数: 0
h-index: 0
机构:
Clarkson Univ, Dept Chem & Biomolecular Engn, POB 5705, Potsdam, NY 13699 USA Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

Metelmann, H-R
论文数: 0 引用数: 0
h-index: 0
机构:
Greifswald Univ, Dept Oral & Maxillofacial Surg, Ferdinand Sauerbruch Str, Greifswald 17475, Germany Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

Mizuno, A.
论文数: 0 引用数: 0
h-index: 0
机构:
Toyohashi Univ Technol, Dept Environm & Life Sci, Grad Sch Engn, Toyohashi, Aichi 4418580, Japan Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

Moreau, E.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Poitiers, PPRIME Inst, CNRS ENSMA, Bd Curie BP 30179, Futuroscope 86962, France Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

Murphy, A. B.
论文数: 0 引用数: 0
h-index: 0
机构:
CSIRO Manufacturing, POB 218, Lindfield, NSW 2070, Australia Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

Niemira, B. A.
论文数: 0 引用数: 0
h-index: 0
机构:
USDA, ARS, Eastern Reg Res Ctr, Food Safety & Intervent Technol Res Unit, 600 Mermaid Lane, Wydnmoor, PA 19038 USA Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

Oehrlein, G. S.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Maryland, Dept Mat Sci & Engn, College Pk, MD 20742 USA
Univ Maryland, Inst Elect & Appl Phys, College Pk, MD 20742 USA Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

Petrovic, Z. Lj
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Belgrade, Inst Phys, Pregrevica 118, Belgrade 11080, Serbia Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

Pitchford, L. C.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Toulouse, LAPLACE, CNRS, INPT,UPS, 118 Route Narbonne, F-31062 Toulouse, France Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

Pu, Y-K
论文数: 0 引用数: 0
h-index: 0
机构:
Tsinghua Univ, Dept Engn Phys, Beijing 100084, Peoples R China Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

Rauf, S.
论文数: 0 引用数: 0
h-index: 0
机构:
Appl Mat Inc, 974 E Arques Ave,M-S 81312, Sunnyvale, CA 94085 USA Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

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Starikovskaia, S.
论文数: 0 引用数: 0
h-index: 0
机构:
Ecole Polytech, Lab Plasma Phys, UMR7648, Route Saclay, F-91128 Palaiseau, France Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

Tennyson, J.
论文数: 0 引用数: 0
h-index: 0
机构:
UCL, Dept Phys & Astronom, London WC1E 6BT, England Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

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Turner, M. M.
论文数: 0 引用数: 0
h-index: 0
机构:
Dublin City Univ, Sch Phys Sci & NCPST, Dublin 9, Ireland Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

van de Sanden, M. C. M.
论文数: 0 引用数: 0
h-index: 0
机构:
Eindhoven Univ Technol, Dept Appl Phys, Box 513, Eindhoven, Netherlands
Dutch Inst Fundamental Energy Res DIFFER, POB 6336, NL-5600 HH Eindhoven, Netherlands Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA

Vardelle, A.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Limoges, SPCTS, UMR 7315, F-87000 Limoges, France Ohio State Univ, Dept Mech & Aerosp Engn, Columbus, OH 43210 USA
[2]
Numerical results for the Ar and CF4 mixture gas in a dual frequency capacitively coupled plasma using a hybrid model
[J].
Bi, Zhen-Hua
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Dai, Zhong-Ling
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Xu, Xiang
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Li, Zhi-Cheng
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Wang, You-Nian
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PHYSICS OF PLASMAS,
2009, 16 (04)

Bi, Zhen-Hua
论文数: 0 引用数: 0
h-index: 0
机构:
Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China

Dai, Zhong-Ling
论文数: 0 引用数: 0
h-index: 0
机构:
Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China

Xu, Xiang
论文数: 0 引用数: 0
h-index: 0
机构:
Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China

Li, Zhi-Cheng
论文数: 0 引用数: 0
h-index: 0
机构:
Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China

Wang, You-Nian
论文数: 0 引用数: 0
h-index: 0
机构:
Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China
[3]
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BOGAERTS, A
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GIJBELS, R
论文数: 0 引用数: 0
h-index: 0
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[4]
Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF4
[J].
Brandt, S.
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Berger, B.
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Schungel, E.
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Derzsi, A.
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Bruneau, B.
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Johnson, E.
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Lafleur, T.
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O'Connell, D.
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Booth, J-P
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Donko, Z.
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Schulze, J.
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PLASMA SOURCES SCIENCE & TECHNOLOGY,
2016, 25 (04)

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Berger, B.
论文数: 0 引用数: 0
h-index: 0
机构:
West Virginia Univ, Dept Phys, Morgantown, WV 26506 USA
Ruhr Univ Bochum, Inst Elect Engn, D-44780 Bochum, Germany West Virginia Univ, Dept Phys, Morgantown, WV 26506 USA

Schungel, E.
论文数: 0 引用数: 0
h-index: 0
机构:
West Virginia Univ, Dept Phys, Morgantown, WV 26506 USA West Virginia Univ, Dept Phys, Morgantown, WV 26506 USA

Korolov, I.
论文数: 0 引用数: 0
h-index: 0
机构:
Hungarian Acad Sci, Wigner Res Ctr Phys, Inst Solid State Phys & Opt, Konkoly Thege Miklos Str 29-33, H-1121 Budapest, Hungary West Virginia Univ, Dept Phys, Morgantown, WV 26506 USA

Derzsi, A.
论文数: 0 引用数: 0
h-index: 0
机构:
Hungarian Acad Sci, Wigner Res Ctr Phys, Inst Solid State Phys & Opt, Konkoly Thege Miklos Str 29-33, H-1121 Budapest, Hungary West Virginia Univ, Dept Phys, Morgantown, WV 26506 USA

Bruneau, B.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Paris Saclay, Ecole Polytech, CNRS, LPICM, F-91128 Palaiseau, France West Virginia Univ, Dept Phys, Morgantown, WV 26506 USA

Johnson, E.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Paris Saclay, Ecole Polytech, CNRS, LPICM, F-91128 Palaiseau, France West Virginia Univ, Dept Phys, Morgantown, WV 26506 USA

Lafleur, T.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Paris Saclay, Ecole Polytech, CNRS, LPP, F-91128 Palaiseau, France West Virginia Univ, Dept Phys, Morgantown, WV 26506 USA

O'Connell, D.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ York, Dept Phys, York Plasma Inst, York YO10 5DD, N Yorkshire, England West Virginia Univ, Dept Phys, Morgantown, WV 26506 USA

Koepke, M.
论文数: 0 引用数: 0
h-index: 0
机构:
West Virginia Univ, Dept Phys, Morgantown, WV 26506 USA West Virginia Univ, Dept Phys, Morgantown, WV 26506 USA

Gans, T.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ York, Dept Phys, York Plasma Inst, York YO10 5DD, N Yorkshire, England West Virginia Univ, Dept Phys, Morgantown, WV 26506 USA

Booth, J-P
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Paris Saclay, Ecole Polytech, CNRS, LPP, F-91128 Palaiseau, France West Virginia Univ, Dept Phys, Morgantown, WV 26506 USA

Donko, Z.
论文数: 0 引用数: 0
h-index: 0
机构:
Hungarian Acad Sci, Wigner Res Ctr Phys, Inst Solid State Phys & Opt, Konkoly Thege Miklos Str 29-33, H-1121 Budapest, Hungary West Virginia Univ, Dept Phys, Morgantown, WV 26506 USA

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A model study of propagation of the first ionization wave during breakdown in a straight tube containing argon
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Brok, WJM
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van Dijk, J
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JOURNAL OF PHYSICS D-APPLIED PHYSICS,
2003, 36 (16)
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Brok, WJM
论文数: 0 引用数: 0
h-index: 0
机构:
Eindhoven Univ Technol, Dept Appl Phys, NL-5600 MB Eindhoven, Netherlands Eindhoven Univ Technol, Dept Appl Phys, NL-5600 MB Eindhoven, Netherlands

van Dijk, J
论文数: 0 引用数: 0
h-index: 0
机构:
Eindhoven Univ Technol, Dept Appl Phys, NL-5600 MB Eindhoven, Netherlands Eindhoven Univ Technol, Dept Appl Phys, NL-5600 MB Eindhoven, Netherlands

Bowden, MD
论文数: 0 引用数: 0
h-index: 0
机构:
Eindhoven Univ Technol, Dept Appl Phys, NL-5600 MB Eindhoven, Netherlands Eindhoven Univ Technol, Dept Appl Phys, NL-5600 MB Eindhoven, Netherlands

van der Mullen, JJAM
论文数: 0 引用数: 0
h-index: 0
机构:
Eindhoven Univ Technol, Dept Appl Phys, NL-5600 MB Eindhoven, Netherlands Eindhoven Univ Technol, Dept Appl Phys, NL-5600 MB Eindhoven, Netherlands

Kroesen, GMW
论文数: 0 引用数: 0
h-index: 0
机构:
Eindhoven Univ Technol, Dept Appl Phys, NL-5600 MB Eindhoven, Netherlands Eindhoven Univ Technol, Dept Appl Phys, NL-5600 MB Eindhoven, Netherlands
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Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H2 and CF4
[J].
Bruneau, B.
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Donko, Z.
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Johnson, E.
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Booth, J-P
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PLASMA SOURCES SCIENCE & TECHNOLOGY,
2016, 25 (01)

Bruneau, B.
论文数: 0 引用数: 0
h-index: 0
机构:
Ecole Polytech, CNRS, LPICM, F-91128 Palaiseau, France Ecole Polytech, CNRS, LPICM, F-91128 Palaiseau, France

Lafleur, T.
论文数: 0 引用数: 0
h-index: 0
机构:
UPMC, Uni Paris Sud, LPP, Ecole Polytech,CNRS, F-91128 Palaiseau, France Ecole Polytech, CNRS, LPICM, F-91128 Palaiseau, France

Gans, T.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ York, Dept Phys, York Plasma Inst, York YO10 5DD, N Yorkshire, England Ecole Polytech, CNRS, LPICM, F-91128 Palaiseau, France

O'Connell, D.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ York, Dept Phys, York Plasma Inst, York YO10 5DD, N Yorkshire, England Ecole Polytech, CNRS, LPICM, F-91128 Palaiseau, France

Greb, A.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ York, Dept Phys, York Plasma Inst, York YO10 5DD, N Yorkshire, England Ecole Polytech, CNRS, LPICM, F-91128 Palaiseau, France

Korolov, I.
论文数: 0 引用数: 0
h-index: 0
机构:
Hungarian Acad Sci, Inst Solid State Phys & Opt, Wigner Res Ctr Phys, Konkoly Thege Miklos Str 29-33, H-1121 Budapest, Hungary Ecole Polytech, CNRS, LPICM, F-91128 Palaiseau, France

Derzsi, A.
论文数: 0 引用数: 0
h-index: 0
机构:
Hungarian Acad Sci, Inst Solid State Phys & Opt, Wigner Res Ctr Phys, Konkoly Thege Miklos Str 29-33, H-1121 Budapest, Hungary Ecole Polytech, CNRS, LPICM, F-91128 Palaiseau, France

Donko, Z.
论文数: 0 引用数: 0
h-index: 0
机构:
Hungarian Acad Sci, Inst Solid State Phys & Opt, Wigner Res Ctr Phys, Konkoly Thege Miklos Str 29-33, H-1121 Budapest, Hungary Ecole Polytech, CNRS, LPICM, F-91128 Palaiseau, France

Brandt, S.
论文数: 0 引用数: 0
h-index: 0
机构:
W Virginia Univ, Dept Phys, Morgantown, WV 26506 USA Ecole Polytech, CNRS, LPICM, F-91128 Palaiseau, France

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Schulze, J.
论文数: 0 引用数: 0
h-index: 0
机构:
W Virginia Univ, Dept Phys, Morgantown, WV 26506 USA Ecole Polytech, CNRS, LPICM, F-91128 Palaiseau, France

Diomede, P.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Houston, Plasma Proc Lab, Dept Chem & Biomol Engn, Houston, TX 77204 USA
DIFFER Dutch Inst Fundamental Energy Res, FOM Inst, POB 6336, NL-5600 HH Eindhoven, Netherlands Ecole Polytech, CNRS, LPICM, F-91128 Palaiseau, France

Economou, D. J.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Houston, Plasma Proc Lab, Dept Chem & Biomol Engn, Houston, TX 77204 USA Ecole Polytech, CNRS, LPICM, F-91128 Palaiseau, France

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Johnson, E.
论文数: 0 引用数: 0
h-index: 0
机构:
Ecole Polytech, CNRS, LPICM, F-91128 Palaiseau, France Ecole Polytech, CNRS, LPICM, F-91128 Palaiseau, France

Booth, J-P
论文数: 0 引用数: 0
h-index: 0
机构:
UPMC, Uni Paris Sud, LPP, Ecole Polytech,CNRS, F-91128 Palaiseau, France Ecole Polytech, CNRS, LPICM, F-91128 Palaiseau, France
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Hagelaar, GJM
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h-index: 0
机构:
Univ Toulouse 3, Ctr Phys Plasmas & Applicat Toulouse, F-31062 Toulouse, France Univ Toulouse 3, Ctr Phys Plasmas & Applicat Toulouse, F-31062 Toulouse, France

Pitchford, LC
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Toulouse 3, Ctr Phys Plasmas & Applicat Toulouse, F-31062 Toulouse, France Univ Toulouse 3, Ctr Phys Plasmas & Applicat Toulouse, F-31062 Toulouse, France
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VIBRATIONAL-RELAXATION OF CF4 AND CH4 AND ENERGY-TRANSFER BETWEEN THESE GASES AND CO
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LEWIS, PA
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h-index: 0
机构:
PHYS CHEM LAB,S PARKS RD,OXFORD OX1 3QZ,ENGLAND PHYS CHEM LAB,S PARKS RD,OXFORD OX1 3QZ,ENGLAND

SKIRROW, MP
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h-index: 0
机构:
PHYS CHEM LAB,S PARKS RD,OXFORD OX1 3QZ,ENGLAND PHYS CHEM LAB,S PARKS RD,OXFORD OX1 3QZ,ENGLAND

SIMPSON, CJSM
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h-index: 0
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PHYS CHEM LAB,S PARKS RD,OXFORD OX1 3QZ,ENGLAND PHYS CHEM LAB,S PARKS RD,OXFORD OX1 3QZ,ENGLAND
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Etch characteristics of HfO2 thin films by using CF4/Ar inductively coupled plasma
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Kang, Pil-Seung
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h-index: 0
机构:
Chung Ang Univ, Sch Elect & Elect Engn, Seoul 156756, South Korea Chung Ang Univ, Sch Elect & Elect Engn, Seoul 156756, South Korea

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Kim, Chang-Il
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Chung Ang Univ, Sch Elect & Elect Engn, Seoul 156756, South Korea Chung Ang Univ, Sch Elect & Elect Engn, Seoul 156756, South Korea