Spectral Methods of Control of Impurities, Their Flows and Localization in an Equilibrium Low-Temperature Plasma of Low Pressure

被引:20
作者
Bernatskiy, A. V. [1 ]
Kochetov, I. V. [1 ,2 ]
Ochkin, V. N. [1 ]
机构
[1] Russian Acad Sci, Lebedev Phys Inst, Moscow 119991, Russia
[2] Troitsk Inst Innovat & Fus Res, Troitsk 108840, Moscow Region, Russia
基金
俄罗斯基础研究基金会;
关键词
nonequilibrium plasma; spectroscopy; reactors; actinometry; kinetic models of plasma-chemical processes; diode laser spectroscopy; tokamaks; ITER; LASER-INDUCED FLUORESCENCE; ELECTRON-ENERGY SPECTRUM; EVALUATED KINETIC-DATA; GLOW-DISCHARGE; CAVITY RING; WATER-MOLECULES; RATE CONSTANTS; REMOTE PLASMA; GAS-PHASE; ABSORPTION-SPECTROSCOPY;
D O I
10.1134/S1063780X20090020
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
The state-of-art of studies of processes involving small fractions of particles formed as a result of chemical transformations of the source gas or appearing from the outside as an impurity is discussed. Various high-sensitivity methods for measuring the low concentrations of particles are considered. The main focus is on spectral methods, both classical and laser ones. The main modern fields of the application of non-equilibrium plasma, features, and achievements of the diagnostic tools used in them are highlighted. The emphasis is on spectroscopic studies of plasma purity in the low-temperature near-wall layers of thermonuclear reactors. In this case, the issue of the penetration of water molecules into the plasma chamber from the cooling circuits is of particular importance. In view of the limited accessibility to the reactors, new remote versions of spectral emission methods are being developed that are focused on the diagnostics of the ITER near-wall plasma. A new method of multispectral optical actinometry is discussed, in which intermediate chemically unstable particles can play the role of actinometers. This broadens the range of possibilities for quantitative measurements of concentrations of particles of different kinds, and increases the sensitivity. Effective actinometric pairs were found for the objects under consideration, e.g., hydrogen and deuterium atoms. The schemes are worked out on laboratory facilities, and kinetic models of plasma-chemical processes are developed. Scaling of the results of model experiments makes it possible to predict the measurement of the impurity flows at the level (10(-9)-10(-13)) Pa m(3)s(-1)with the localization of sources determined by the spatial resolution of the optical system.
引用
收藏
页码:874 / 919
页数:46
相关论文
共 217 条
[1]  
Abachev M. K., 1997, Russian Microelectronics, V26, P192
[2]   Multiscale multiphysics nonempirical approach to calculation of light emission properties of chemically active nonequilibrium plasma: application to Ar-GaI3 system [J].
Adamson, S. ;
Astapenko, V. ;
Chernysheva, I. ;
Chorkov, V. ;
Deminsky, M. ;
Demchenko, G. ;
Demura, A. ;
Demyanov, A. ;
Dyatko, N. ;
Eletzkii, A. ;
Knizhnik, A. ;
Kochetov, I. ;
Napartovich, A. ;
Rykova, E. ;
Sukhanov, L. ;
Umanskii, S. ;
Vetchinkin, A. ;
Zaitsevskii, A. ;
Potapkin, B. .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2007, 40 (13) :3857-3881
[3]   Absolute densities of N and excited N2 in a N2 plasma [J].
Agarwal, S ;
Hoex, B ;
van de Sanden, MCM ;
Maroudas, D ;
Aydil, ES .
APPLIED PHYSICS LETTERS, 2003, 83 (24) :4918-4920
[4]  
Albers E. A., 1971, S INT COMBUST, V13, P81, DOI [10.1016/S0082-0784(71)80012-7, DOI 10.1016/S0082-0784(71)80012-7]
[5]   Frequency modulation upon nonstationary heating of the p-n junction in high-sensitive diode laser spectroscopy [J].
Andreev, S. N. ;
Nikolaev, I. V. ;
Ochkin, V. N. ;
Savinov, S. Yu. ;
Spiridonov, M. V. ;
Tskhai, S. N. .
QUANTUM ELECTRONICS, 2007, 37 (04) :399-404
[6]   The Langmuir probe measurements in a low-pressure discharge supported by hollow cathode using the combined periodic and noise sweep signals [J].
Andreev, S. N. ;
Bernatskiy, A. V. ;
Ochkin, V. N. .
VACUUM, 2020, 180
[7]  
Andreev S. N., 2019, Journal of Physics: Conference Series, V1370, DOI 10.1088/1742-6596/1370/1/012011
[8]  
[Anonymous], 1999, NUCL FUSION, V39, P2391, DOI [10.1088/0029-5515/39/12/304, DOI 10.1088/0029-5515/39/12/304]
[9]  
[Anonymous], 1999, Nucl. Fusion, DOI DOI 10.1088/0029-5515/39/12/302
[10]  
[Anonymous], 2009, Cavity ring-down spectroscopy: techniques and applicationsM