Influence of surface topography on depth profiles obtained by Rutherford backscattering spectrometry

被引：12
|
作者：
Slotte, J
Laakso, A
Ahlgren, T
Rauhala, E
Salonen, R
Räisänen, J
Simon, A
Uzonyi, I
Kiss, AZ
Somorjai, E
机构：
[1] Helsinki Univ Technol, Phys Lab, FIN-02015 Hut, Finland
[2] Univ Helsinki, Accelerator Lab, FIN-00014 Helsinki, Finland
[3] Hungarian Acad Sci, Inst Nucl Res, H-4001 Debrecen, Hungary
[4] Univ Jyvaskyla, Dept Phys, FIN-40351 Jyvaskyla, Finland
来源：
JOURNAL OF APPLIED PHYSICS | 2000年 / 87卷 / 01期
关键词：
D O I：
10.1063/1.371835
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A method for determining correct depth profiles from samples with rough surfaces is presented. The method combines Rutherford backscattering spectrometry with atomic force microscopy. The topographical information obtained by atomic force microscopy is used to calculate the effect of the surface roughness on the backscattering spectrum. As an example, annealed Au/ZnSe heterostructures are studied. Gold grains were observed on the surfaces of the annealed samples. The annealing also caused diffusion of gold into the ZnSe. Backscattering spectra of the samples were measured with a 2 MeV He-4(+) ion beam. A scanning nuclear microprobe was used to verify the results by measuring backscattering from grains and from areas of the samples where no grains had been formed during annealing. (C) 2000 American Institute of Physics. [S0021-8979(00)07501-0].
引用
收藏
页码：140 / 143
页数：4
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