Noise Effects on Resonator Bias Polarization in CMOS-MEMS Oscillators

被引：0
|
作者：
Sobreviela, G. [1 ]
Riverola, M. [1 ]
Uranga, A. [1 ]
Barniol, N. [1 ]
机构：
[1] Univ Autonoma Barcelona, Bellaterra, Spain
来源：
2014 IEEE SENSORS | 2014年
关键词：
Noise; CMOS-MEMS; MEMS-Based Oscillator; oscillator Jitter; Radio-Frequency MEMS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, the effects of noise components in the DC bias voltage of the MEMS-NEMS resonators, electrostatically driven and capacitively sensed over the total system behavior are studied. The effect of first, white noise and second, a pure tone, in power spectrum, phase noise and time jitter of the output signal of a CMOS MEMS-NEMS oscillator system are analyzed.
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页数：4
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