Noise Effects on Resonator Bias Polarization in CMOS-MEMS Oscillators

被引：0

作者：

Sobreviela, G. ^{[1
]}

Riverola, M. ^{[1
]}

Uranga, A. ^{[1
]}

Barniol, N. ^{[1
]}

机构：

[1] Univ Autonoma Barcelona, Bellaterra, Spain

来源：

2014 IEEE SENSORS | 2014年

关键词：

Noise; CMOS-MEMS; MEMS-Based Oscillator; oscillator Jitter; Radio-Frequency MEMS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, the effects of noise components in the DC bias voltage of the MEMS-NEMS resonators, electrostatically driven and capacitively sensed over the total system behavior are studied. The effect of first, white noise and second, a pure tone, in power spectrum, phase noise and time jitter of the output signal of a CMOS MEMS-NEMS oscillator system are analyzed.

引用

页数：4

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