High oriented ZnO films by sol-gel and chemical bath deposition combination method

被引:28
作者
Cheng, Hua-Chi [1 ]
Chen, Chia-Fu [1 ,2 ]
Tsay, Chien-Yie [3 ]
Leu, Jih-Perng [1 ]
机构
[1] Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan
[2] Ming Doo Univ, Inst Mat & Syst Engn, Changhua 52345, Taiwan
[3] Feng Chia Univ, Dept Mat Sci & Engn, Taichung 40724, Taiwan
关键词
ZnO; Thin films; Crystal growth; Crystal structure; PULSED-LASER DEPOSITION; ZINC-OXIDE FILMS; THIN-FILMS;
D O I
10.1016/j.jallcom.2008.08.080
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Poly-crystalline ZnO films with high oriented columnar grains were deposited on ZnO-coated seed layers by chemical bath deposition (CBD) in an aqueous-solution bath containing zinc nitrate [Zn(NO3)(2)center dot 6H(2)O], and dimethylamineborane (DMAB) at 60 degrees C without pre-activation especially. Sol-gel ZnO films on glass substrates were used as the seed layers which the mean size of the crystals in seed layer increased from several to approximately 80nm at temperature from 150 degrees C to 550 degrees C. The deposited ZnO films on the ZnO-coated seed surfaces are preferentially on the (0 0 2) plane and exhibit increased from several 10 nm to 150 nm with increasing seed layer grain size. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码:L46 / L49
页数:4
相关论文
共 17 条
  • [1] Bauer E., 1964, SINGLE CRYSTAL FILMS, P43
  • [2] Ultraviolet lasing in resonators formed by scattering in semiconductor polycrystalline films
    Cao, H
    Zhao, YG
    Ong, HC
    Ho, ST
    Dai, JY
    Wu, JY
    Chang, RPH
    [J]. APPLIED PHYSICS LETTERS, 1998, 73 (25) : 3656 - 3658
  • [3] Substrate dependence of preferred orientation in sol-gel-derived zinc oxide films
    Chakrabarti, S
    Ganguli, D
    Chaudhuri, S
    [J]. MATERIALS LETTERS, 2004, 58 (30) : 3952 - 3957
  • [4] CHENG HC, 2007, APPL PHYS LETT, V90, P3
  • [5] de Minjer C.H., 1973, J. Electrochem. Soc, V120, P1644
  • [6] Effect of substrate-induced strain on the structural, electrical, and optical properties of polycrystalline ZnO thin films
    Ghosh, R
    Basak, D
    Fujihara, S
    [J]. JOURNAL OF APPLIED PHYSICS, 2004, 96 (05) : 2689 - 2692
  • [7] Microstructures, electrical and optical characteristics of ZnO thin films by oxygen plasma-assisted pulsed laser deposition
    Gu, Yanfei
    Li, Xiaomin
    Yu, Weidong
    Gao, Xiangdong
    Zhao, Junliang
    Yang, Chang
    [J]. JOURNAL OF CRYSTAL GROWTH, 2007, 305 (01) : 36 - 39
  • [8] *INT CTR DIFFR DAT, 1986, 361451 INT CTR DIFFR
  • [9] A 5% efficient photo electrochemical solar cell based on nanostructured ZnO electrodes
    Keis, K
    Magnusson, E
    Lindström, H
    Lindquist, SE
    Hagfeldt, A
    [J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2002, 73 (01) : 51 - 58
  • [10] KOCH MH, 2005, Patent No. 6921552