High oriented ZnO films by sol-gel and chemical bath deposition combination method

被引：28

作者：

Cheng, Hua-Chi ^{[1
]}

Chen, Chia-Fu ^{[1
,2
]}

Tsay, Chien-Yie ^{[3
]}

Leu, Jih-Perng ^{[1
]}

机构：

[1] Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan

[2] Ming Doo Univ, Inst Mat & Syst Engn, Changhua 52345, Taiwan

[3] Feng Chia Univ, Dept Mat Sci & Engn, Taichung 40724, Taiwan

来源：

JOURNAL OF ALLOYS AND COMPOUNDS | 2009年 / 475卷 / 1-2期

关键词：

ZnO; Thin films; Crystal growth; Crystal structure; PULSED-LASER DEPOSITION; ZINC-OXIDE FILMS; THIN-FILMS;

D O I：

10.1016/j.jallcom.2008.08.080

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Poly-crystalline ZnO films with high oriented columnar grains were deposited on ZnO-coated seed layers by chemical bath deposition (CBD) in an aqueous-solution bath containing zinc nitrate [Zn(NO3)(2)center dot 6H(2)O], and dimethylamineborane (DMAB) at 60 degrees C without pre-activation especially. Sol-gel ZnO films on glass substrates were used as the seed layers which the mean size of the crystals in seed layer increased from several to approximately 80nm at temperature from 150 degrees C to 550 degrees C. The deposited ZnO films on the ZnO-coated seed surfaces are preferentially on the (0 0 2) plane and exhibit increased from several 10 nm to 150 nm with increasing seed layer grain size. (C) 2008 Elsevier B.V. All rights reserved.

引用

页码：L46 / L49

页数：4

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