共 50 条
- [46] Temperature analysis for the point-cell source in the vapor deposition process KSME INTERNATIONAL JOURNAL, 2004, 18 (09): : 1680 - 1688
- [47] Deposition of a-C:H:SiOx Coatings Using Low-Frequency Inductively Coupled Plasma PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2024, 221 (11):