The influence of porosity on the electromechanical and pyroelectric properties of Ca-modified PbTiO3 thin films

被引：8

作者：

Seifert, A ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, Swiss Fed Inst Technol, Dept Mat, Ceram Lab, CH-1015 Lausanne, Switzerland

来源：

JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY | 1999年 / 16卷 / 1-2期

关键词：

Pb1-xCaxTiO3; thin film; pyroelectric; electromechanical; porosity;

D O I：

10.1023/A:1008752919139

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The properties of Pb1-xCaxTiO3 (x = 0-30) thin films for electromechanical and pyroelectric applications can be further improved if porous, low-dielectric constant layers are being used. The electric field dependent strain, piezoelectric coefficient, pyroelectric coefficient and the pyroelectric figure of merit were evaluated as a function of the Ca-content and relative density of the thin films. The heating-rate during the final anneal was observed to be the controlling parameter for the evolution of either dense or porous microstructures. Both 2-methoxyethanol and 1,3-propanediol based solution precursors were used for spin-coating platinized Si3N4/SiO2/Si wafers. Microstructure-property relationships and electrical properties concerning the domain mobility were examined.

引用

页码：13 / 20

页数：8

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