Effect of the Conditions of the AACVD Synthesis of Thin Nanostructured ZnO Films on Their Microstructural, Optical, and Gas-Sensing Characteristics

被引：7

作者：

Mokrushin, A. S. ^{[1
]}

Gorban, Yu. M. ^{[1
,2
]}

Nagornov, I. A. ^{[1
]}

Simonenko, N. P. ^{[1
]}

Simonenko, E. P. ^{[1
]}

Kuznetsov, N. T. ^{[1
]}

机构：

[1] Russian Acad Sci, Kurnakov Inst Gen & Inorgan Chem, Moscow 119991, Russia

[2] Mendeleev Univ Chem Technol Russia, Moscow 125047, Russia

来源：

RUSSIAN JOURNAL OF INORGANIC CHEMISTRY | 2022年 / 67卷 / 12期

关键词：

zinc oxide; thin films; AACVD; gas sensor; ethanol; acetone; CHEMICAL-VAPOR-DEPOSITION; GROWTH; TRANSPARENT; TEMPERATURE; MECHANISM;

D O I：

10.1134/S0036023622601520

中图分类号：

O61 [无机化学];

学科分类号：

070301 ; 081704 ;

摘要：

The effect of the parameters of the synthesis of finely divided ZnO by aerosol deposition from the gas phase on its microstructural characteristics was studied to develop an efficient method for creating selective gas-sensing films based on semiconductor metal oxides. It was shown that an increase in the operating temperature from 350 to 450 & DEG;C leads to a change in the shape of the nanoparticles from spherical to rod-shaped and in the continuity of the coatings. The optical and chemoresistive gas-sensing properties of the obtained films were studied, the band gap was calculated in two ways. The highest sensitivity was measured at a detection temperature of 300 & DEG;C to acetone and ethanol.

引用

页码：2099 / 2107

页数：9

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