Effect of the Conditions of the AACVD Synthesis of Thin Nanostructured ZnO Films on Their Microstructural, Optical, and Gas-Sensing Characteristics

被引：7

作者：

Mokrushin, A. S. ^{[1
]}

Gorban, Yu. M. ^{[1
,2
]}

Nagornov, I. A. ^{[1
]}

Simonenko, N. P. ^{[1
]}

Simonenko, E. P. ^{[1
]}

Kuznetsov, N. T. ^{[1
]}

机构：

[1] Russian Acad Sci, Kurnakov Inst Gen & Inorgan Chem, Moscow 119991, Russia

[2] Mendeleev Univ Chem Technol Russia, Moscow 125047, Russia

来源：

RUSSIAN JOURNAL OF INORGANIC CHEMISTRY | 2022年 / 67卷 / 12期

关键词：

zinc oxide; thin films; AACVD; gas sensor; ethanol; acetone; CHEMICAL-VAPOR-DEPOSITION; GROWTH; TRANSPARENT; TEMPERATURE; MECHANISM;

D O I：

10.1134/S0036023622601520

中图分类号：

O61 [无机化学];

学科分类号：

070301 ; 081704 ;

摘要：

The effect of the parameters of the synthesis of finely divided ZnO by aerosol deposition from the gas phase on its microstructural characteristics was studied to develop an efficient method for creating selective gas-sensing films based on semiconductor metal oxides. It was shown that an increase in the operating temperature from 350 to 450 & DEG;C leads to a change in the shape of the nanoparticles from spherical to rod-shaped and in the continuity of the coatings. The optical and chemoresistive gas-sensing properties of the obtained films were studied, the band gap was calculated in two ways. The highest sensitivity was measured at a detection temperature of 300 & DEG;C to acetone and ethanol.

引用

页码：2099 / 2107

页数：9

共 47 条

[1] Electronic Nose as a Novel Method for Diagnosing Cancer: A Systematic Review [J].

Baldini, Chiara ;

Billeci, Lucia ;

Sansone, Francesco ;

Conte, Raffaele ;

Domenici, Claudio ;

Tonacci, Alessandro .

BIOSENSORS-BASEL, 2020, 10 (08)

[2] Aerosol Assisted Chemical Vapor Deposition of Transparent Conductive Zinc Oxide Films [J].

Bhachu, Davinder S. ;

Sankar, Gopinathan ;

Parkin, Ivan P. .

CHEMISTRY OF MATERIALS, 2012, 24 (24) :4704-4710

[3] Influence of dopant concentration on the optical properties of ZnO: In films by sol-gel method [J].

Caglar, Mujdat ;

Ilican, Saliha ;

Caglar, Yasemin .

THIN SOLID FILMS, 2009, 517 (17) :5023-5028

[4] Effects of growth temperature on performance and stability of zinc oxide thin film transistors fabricated by thermal atomic layer deposition [J].

Cho, Sung Woon ;

Ahn, Cheol Hyoun ;

Yun, Myeong Gu ;

Kim, So Hee ;

Cho, Hyung Koun .

THIN SOLID FILMS, 2014, 562 :597-602

[5] AACVD Synthesis and Characterization of Iron and Copper Oxides Modified ZnO Structured Films [J].

Claros, Martha ;

Setka, Milena ;

Jimenez, Yecid P. ;

Vallejos, Stella .

NANOMATERIALS, 2020, 10 (03)

[6]

Deng Y., 2019, Semiconducting Metal Oxides for Gas Sensing, DOI [10.1007/978-981-13-5853-1, DOI 10.1007/978-981-13-5853-1]

[7] Aerosol assisted chemical vapour deposition of nanostructured ZnO thin films for NO2 and ethanol monitoring [J].

Ding, Jian ;

Chen, Shuqun ;

Han, Ning ;

Shi, Yi ;

Hu, Peng ;

Li, Hongyi ;

Wang, Jinshu .

CERAMICS INTERNATIONAL, 2020, 46 (10) :15152-15158

[8] Highly transparent and conductive indium-doped zinc oxide films deposited at low substrate temperature by spray pyrolysis from water-based solutions [J].

Edinger, S. ;

Bansal, N. ;

Bauch, M. ;

Wibowo, R. A. ;

Ujvari, G. ;

Hamid, R. ;

Trimmel, G. ;

Dimopoulos, T. .

JOURNAL OF MATERIALS SCIENCE, 2017, 52 (14) :8591-8602

[9] Analysis of exhaled air for early-stage diagnosis of lung cancer: opportunities and challenges [J].

Ganeev, Aleksandr A. ;

Gubal, Anna R. ;

Lukyanov, Gennadij N. ;

Arseniev, Andrey I. ;

Barchuk, Anton A. ;

Jahatspanian, Igor E. ;

Gorbunov, Ilja S. ;

Rassadina, Anna A. ;

Nemets, Valerij M. ;

Nefedov, Andrey O. ;

Korotetsky, Boris A. ;

Solovyev, Nikolay D. ;

Iakovleva, Evgenia ;

Ivanenko, Natalja B. ;

Kononov, Aleksandr S. ;

Sillanpaa, Mika ;

Seeger, Thomas .

RUSSIAN CHEMICAL REVIEWS, 2018, 87 (09) :904-921

[10] Flexible nickel-doped zinc oxide thin-film transistors fabricated on plastic substrates at low temperature [J].

Huang, Lingling ;

Han, Dedong ;

Chen, Zhuofa ;

Cong, Yingying ;

Wu, Jing ;

Zhao, Nannan ;

Dong, Junchen ;

Zhao, Feilong ;

Liu, Lifeng ;

Zhang, Shengdong ;

Zhang, Xing ;

Wang, Yi .

JAPANESE JOURNAL OF APPLIED PHYSICS, 2015, 54 (04)

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