Frequency-comb-based interferometer for profilometry and tomography

被引：53

作者：

Choi, Samuel ^{[1
]}

Yamamoto, Mitsufumi ^{[1
]}

Moteki, Daisuke ^{[1
]}

Shioda, Tatsutoshi ^{[1
]}

Tanaka, Yosuke ^{[1
]}

Kurokawa, Takashi ^{[1
]}

机构：

[1] Tokyo Univ Agr & Technol, Dept Technol, Tokyo 1848588, Japan

来源：

OPTICS LETTERS | 2006年 / 31卷 / 13期

关键词：

D O I：

10.1364/OL.31.001976

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A novel interferometry technique using a frequency-comb light source is proposed for surface profilometry and tomography of discontinuous objects. Surface profile measurement is performed by sweeping the comb interval frequency without mechanical scanning. Step heights of 0.5 and 1.0 mm are successfully measured by use of the scheme with 9 mu m accuracy. (c) 2006 Optical Society of America.

引用

页码：1976 / 1978

页数：3

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