Fabrication and electrorotation of a novel epoxy based micromotor working in a uniform DC electric field

被引:5
|
作者
Bauer, Rita A. [1 ]
Kelemen, Lorand [2 ]
Nakano, Masami [3 ]
Totsuka, Atsushi [3 ]
Zrinyi, Miklos [1 ,4 ]
机构
[1] Semmelweis Univ, Dept Biophys & Radiat Biol, H-1089 Budapest, Hungary
[2] Hungarian Acad Sci, Biol Res Ctr, H-6726 Szeged, Hungary
[3] Tohoku Univ, Inst Fluid Sci, Intelligent Fluid Control Syst Lab, Aoba Ku, Sendai, Miyagi 9808577, Japan
[4] Semmelweis Univ, Dept Biophys & Radiat Biol, MTA SE Mol Biophys Res Grp, H-1089 Budapest, Hungary
关键词
micro-electromechanical systems (MEMS); micro-electromotor; electro-rotation; Quincke rotation; ROTATION;
D O I
10.1088/0964-1726/24/10/105010
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We have presented the first direct observation of electric field induced rotation of epoxy based polymer rotors. Polymer disks, hollow cylinders and gears were prepared in few micrometer dimensions as rotors. Electrorotation of these sub-millimeter sized tools was studied under uniform dc electric field. The effects of shape, size and thickness were investigated. The novel epoxy based micro devices show intensive spinning in a uniform dc electric field. The rotational speed of micron-sized polymer rotors can be conveniently tuned in a wide range (between 300 and 3000 rpm) by the electric field intensity, opening new perspectives for their use in several MEMS applications.
引用
收藏
页数:5
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