Influence of outgassing organic contamination on the transmittance and laser-induced damage of SiO2 sol-gel antireflection film

被引:26
作者
Yang, Liang [1 ,2 ]
Xiang, Xia [1 ]
Miao, Xinxiang [2 ]
Li, Zhijie [1 ]
Zhou, Guorui. [2 ]
Yan, Zhonghua [1 ]
Yuan, Xiaodong [2 ]
Zheng, Wanguo [2 ]
Zu, Xiaotao [1 ]
机构
[1] Univ Sci & Technol China, Sch Phys Elect, Chengdu 610054, Peoples R China
[2] China Acad Engn Phys, Res Ctr Laser Fus, Mianyang 621900, Peoples R China
基金
中国国家自然科学基金;
关键词
sol-gel antireflection film; organic contamination; transmission; laser-induced damage threshold; PERFORMANCE; THRESHOLD; IMPACT;
D O I
10.1117/1.OE.54.12.126101
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The influence of organic contamination (rubber outgassing) on the transmittance of the SiO2 sol-gel antireflection (AR) film and laser-induced damage threshold (LIDT) at 355 nm for 3 omega AR film and at 1064 nm for 1 omega AR film is studied. The correlation between the contamination time and the transmittance loss/LIDT of 1 omega/3 omega AR film is also investigated both in atmospheric and vacuum environments. The results show that the transmittance loss increases with increasing contamination time, and the LIDT decreases with increasing contamination time for both in atmospheric and vacuum environments. In addition, the resistance against contamination of the 1 omega film is stronger than 3 omega film, and the contamination is more serious in vacuum than in an atmosphere environment for the same contamination time. Meanwhile, the damage mechanism is also discussed. It indicated that both the porous structure and photo-thermal absorption contribute to the decreasing LIDT of the sol-gel AR film. (C) 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)
引用
收藏
页数:6
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