共 50 条
- [41] TIP-BASED NANOMANUFACTURING (TBN) OF NANOFLUIDICS USING AFM PROCEEDINGS OF THE ASME 11TH INTERNATIONAL MANUFACTURING SCIENCE AND ENGINEERING CONFERENCE, 2016, VOL 1, 2016,
- [42] Downwards to metrology in nanoscale: determination of the AFM tip shape with well-known sharp-edged calibration structures Applied Physics A, 2003, 76 : 913 - 917
- [43] Downwards to metrology in nanoscale:: determination of the AFM tip shape with well-known sharp-edged calibration structures APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2003, 76 (06): : 913 - 917
- [45] Blind reconstruction of atomic force microscopy tip morphology by using porous anodic alumina membrane MICRO & NANO LETTERS, 2012, 7 (12): : 1282 - 1284
- [46] Molecular dynamics simulation of AFM/FFM surface observation: Influence of probe tip shape PROCEEDINGS OF THE 35TH INTERNATIONAL MATADOR CONFERENCE: FORMERLY THE INTERNATIONAL MACHINE TOOL DESIGN AND RESEARCH CONFERENCE, 2007, : 271 - +
- [48] Advanced CD-AFM probe tip shape characterization for metrology accuracy and throughput METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXI, PTS 1-3, 2007, 6518
- [49] A strategy for faster blind reconstruction of tip geometry for scanned probe microscopy METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XII, 1998, 3332 : 10 - 18
- [50] Critical Dimension AFM tip characterization and image reconstruction applied to the 45 nm node METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XX, PTS 1 AND 2, 2006, 6152