Study of Thin Film Tin Oxide for Reliability as Gas Sensing Material

被引：0
作者：
Shankar, Ravi [1 ]
Loh, Tien Choy [1 ]
Le, Le Khaing [1 ]
Khor, Chun Wei [1 ]
Kam, Shian Yeu [1 ]
Ramonda, Patrice [1 ]
机构：
[1] STMicroelect Pte Ltd, 28,Ang Mo Kio Ind Pk 2, Singapore 569508, Singapore
来源：
2020 IEEE ELECTRON DEVICES TECHNOLOGY AND MANUFACTURING CONFERENCE (EDTM 2020) | 2020年
关键词：
Semiconductor metal oxide; Tin oxide; microheater; annealing; gas sensor; accelerated life testing; Mean time to failure; DC testing; SURFACE;
D O I：
10.1109/edtm47692.2020.9117957
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Semiconductor Metal Oxide (SMO) films are widely used in gas sensors application. The SMO film is typically heated to an operating temperature of 100 degrees C and above to sense the target gases, using a microheater. The stability and reliability of the microheater and the SMO is critical for making a sensing product out of it. The thermal stability of the dielectric films used in the integration along with the degradation of the sensitive film is the aim of our study. Exposure to high temperature, causes the different layers to expand differently. These layers have different thermal expansion coefficient, that when contracting cause the films to crack.
引用
收藏
页数：3
相关论文
共 10 条
  • [1] Characterization of an embedded micro-heater for gas sensors applications
    Baroncini, M
    Placidi, P
    Scorzoni, A
    Cardinali, GC
    Dori, L
    Nicoletti, S
    [J]. 2001 INTERNATIONAL SYMPOSIUM ON VLSI TECHNOLOGY, SYSTEMS, AND APPLICATIONS, PROCEEDINGS OF TECHNICAL PAPERS, 2001, : 164 - 167
  • [2] The surface and materials science of tin oxide
    Batzill, M
    Diebold, U
    [J]. PROGRESS IN SURFACE SCIENCE, 2005, 79 (2-4) : 47 - 154
  • [3] A smart sensor system for carbon monoxide detection
    Cardinali, GC
    Dori, L
    Fiorini, M
    Sayago, I
    Faglia, G
    Perego, C
    Sberveglieri, G
    Liberali, V
    Maloberti, F
    Tonietto, D
    [J]. ANALOG INTEGRATED CIRCUITS AND SIGNAL PROCESSING, 1997, 14 (03) : 275 - 296
  • [4] Investigation of stability and reliability of tin oxide thin-film for integrated micro-machined gas sensor devices
    Sharma, RK
    Chan, PCH
    Tang, ZN
    Yan, GZ
    Hsing, IM
    Sin, JKO
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2001, 81 (01) : 9 - 16
  • [5] Investigation and control of microcracks in tin oxide gas sensing thin-films
    Tang, ZN
    Chan, PCH
    Sharma, RK
    Yan, GZ
    Hsing, IM
    Sin, JKO
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2001, 79 (01) : 39 - 47
  • [6] Tripathi Amit Kumar, 2014, Forest Ecosystems, V1, P23, DOI 10.1186/s40663-014-0023-2
  • [7] Metal Oxide Gas Sensors: Sensitivity and Influencing Factors
    Wang, Chengxiang
    Yin, Longwei
    Zhang, Luyuan
    Xiang, Dong
    Gao, Rui
    [J]. SENSORS, 2010, 10 (03) : 2088 - 2106
  • [8] INTERACTIONS OF TIN OXIDE SURFACE WITH O2,H2O AND H-2
    YAMAZOE, N
    FUCHIGAMI, J
    KISHIKAWA, M
    SEIYAMA, T
    [J]. SURFACE SCIENCE, 1979, 86 (JUL) : 335 - 344
  • [9] Ultra-low-power components for an RFID Tag with physical and chemical sensors
    Zampolli, Stefano
    Elmi, Ivan
    Cozzani, Enrico
    Cardinali, Gian Carlo
    Scorzoni, Andrea
    Cicioni, Michele
    Marco, Santiago
    Palacio, Francisco
    Gomez-Cama, Jose M.
    Sayhan, Ilker
    Becker, Thomas
    [J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2008, 14 (4-5): : 581 - 588
  • [10] Zhao Sijun, 2008, 2008 IEEE Conference on Robotics, Automation and Mechatronics (RAM), P1071, DOI 10.1109/RAMECH.2008.4681467
1