Strain-induced direct band gap shrinkage in local Ge-on-insulator structures fabricated by lateral liquid-phase epitaxy

被引:20
作者
Matsue, Masahiro [1 ]
Yasutake, Yuhsuke [2 ]
Fukatsu, Susumu [2 ]
Hosoi, Takuji [1 ]
Shimura, Takayoshi [1 ]
Watanabe, Heiji [1 ]
机构
[1] Osaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan
[2] Univ Tokyo, Grad Sch Arts & Sci, Meguro Ku, Tokyo 1538902, Japan
关键词
SI; SUBSTRATE; MOSFETS;
D O I
10.1063/1.4862890
中图分类号
O59 [应用物理学];
学科分类号
摘要
Direct band gap shrinkage in Ge-on-insulator (GOI) structures fabricated by lateral liquid-phase epitaxy (LLPE) was investigated by means of micro(mu)-photoluminescence and mu-Raman spectroscopy. The LLPE method, based on the rapid thermal process, was found to be an effective and feasible way to produce highly strained local GOI structures. We observed a significant redshift of direct gap emission amounting to 45meV from the tensile-strained GOI layer. Strain analysis and temperature dependent PL spectra indicated that a direct band gap shrinkage was mainly due to a tensile strain of about 0.4% induced by rapid crystallization from the Ge melting point during the LLPE process. The local optical properties along the LLPE-grown GOI wire were examined and discussed on the basis of mu-PL mapping images. (C) 2014 AIP Publishing LLC.
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页数:4
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