Optimization of the planar pellistor using finite element analysis

被引：0

作者：

McRobbie, G ^{[1
]}

Clark, F ^{[1
]}

Tandy, C ^{[1
]}

机构：

[1] Univ Paisley, Div Elect Engn & Phys, Paisley PA1 2BE, Renfrew, Scotland

来源：

DESIGN, TEST, INTEGRATION, AND PACKAGING OF MEMS/MOEMS 2002 | 2002年 / 4755卷 / 4755期

关键词：

planar pellistor; gas sensor; finite element; optimization;

D O I：

10.1117/12.462816

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The planar pellistor is a thin film. microsensor used for the detection of inflammable gases.(1) In its simplest it consists of a metallic meander structure that serves both as a heater for the catalyst and as a temperature sensor.(2) For low power operation thermal insulation between the sensor and the substrate is vital and is achieved by a thin silicon nitride membrane. The optimisation of such a structure in terms of the sensor's dimensions is discussed.

引用

页码：240 / 247

页数：8