Tribological behavior of diamond-like carbon produced by rf-PCVD based on energetic evaluation

被引:14
|
作者
Yamamoto, Shuji [1 ]
Kawana, Atsuo [2 ]
Masuda, Chitoshi [3 ]
机构
[1] Sankei Giken Kogyo Co LTD, Kita Ku, Tokyo 1158555, Japan
[2] Japan Coating Ctr Co LTD, Zama, Kanagawa 2520002, Japan
[3] Waseda Univ, Grad Sch Fundamental Sci & Engn, Shinjuku Ku, Tokyo 1698555, Japan
关键词
Diamond-like carbon; Hydrogen contents; Input energy; Wear loss; AMORPHOUS-CARBON; ABRASIVE WEAR; FILMS; COATINGS; HYDROGEN; PERFORMANCE; ENVIRONMENT; FRICTION; SPECTRA;
D O I
10.1016/j.surfcoat.2013.10.037
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Two types of diamond-like carbon (DLC) were evaluated for their tribological behavior in terms of the tribometer input energy. The DLC samples were prepared from methane (denoted DLC[CH4]) or benzene (denoted DLC [C6H6]) as a gas source on tungsten-carbide (WC) substrates by radio-frequency plasma chemical vapor deposition (rf-PCVD). The hydrogen contents of the DLCs were measured by Elastic Recoil Detection Analysis (ERDA). The DLC structures were investigated by Raman spectrometry and X-ray photoelectron spectroscopy (XPS). The basic mechanical properties, such as the hardness and the Young's modulus, were obtained by a nano-indenter. The DLC films against alumina were tribo-tested by a ball-on-disk. The input energy was calculated using the applied load, the friction coefficient, and the sliding distance in each tribo-test. The wear behavior of the DLC[CH4] sample was better than that of the DLC[C6H6], even though the hardness of DLC[CH4] was lower than that of DLC[C6H6]. The wear loss of DLC[CH4] and DLC[C6H6] was evaluated by the input energy, and the wear resistance difference of the DLCs was characterized in terms of the input energy. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码:457 / 464
页数:8
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