Enhancement of electron emission from near-coalescent nanometer thick continuous diamond films

被引:12
作者
Ternyak, O. [1 ]
Michaelson, Sh. [1 ]
Akhvlediani, R. [1 ]
Hoffman, A. [1 ]
机构
[1] Technion Israel Inst Technol, Dept Chem, IL-32000 Haifa, Israel
关键词
diamond film; electron emission; thickness;
D O I
10.1016/j.diamond.2005.10.047
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this study we report on the dependence of electron emission properties of undoped diamond films on film thickness. It was found that regardless of primary excitation, the electron emission exhibits maximum values for near-coalescent nanometer thick continuous diamond films. The electron emission induced by photons, ions, electrons and electric fields was consistently investigated and compared for diamond film thicknesses from 70 nm up to 4.7 mu m. The absolute quantum photoyield (QPY) value at photon energy of 8.85 eV increases with film deposition time from 2.5% (carbonized silicon substrate) to 14% for a continuous 70 nm thick diamond film, followed by a decrease to 12% and stabilization for films of thicknesses above similar to 150-200 nm. The initial coefficient of ion induced electron emission (IIEE), by 140 keV Ar+ ions, also reaches its maximum value of 116 at similar to 100 nm diamond film thickness and decreases to 90-100 for thicker films. The secondary electron emission (SEE) shows maximum yield (delta(max)) at primary electron energy of similar to 1000 eV. The dependence of delta(max) on film thickness displays similar behavior as QPY value: it obtains its maximum value of delta(max) similar to 10 at film thickness of similar to 100 nm and drops to somewhat constant value of delta(max) similar to 6.6 for thicker films. The threshold field, required for field electron emission (FEE) current of 0.3 mu A/cm(2), reaches its minimum of similar to 8.5 V/mu m for similar to 100 nm thick diamond film and monotonically increases for thicker diamond films. Possible reasons for the phenomenon of enhanced electron emission from the 70 - 100 nm thick diamond films have been discussed. (c) 2005 Published by Elsevier B.V.
引用
收藏
页码:850 / 853
页数:4
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