Simulation and realization of a novel micromechanical bi-stable switch

被引：26

作者：

Freudenreich, M ^{[1
]}

Mescheder, U ^{[1
]}

Somogyi, G ^{[1
]}

机构：

[1] Univ Appl Sci Furtwangen, Inst Appl Res, D-78120 Furtwangen, Germany

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2004年 / 114卷 / 2-3期

关键词：

bi-stability; micromechanical switch; SOI-technology; FEM-simulation; fibre switch;

D O I：

10.1016/j.sna.2004.01.034

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new concept for a micro mechanical bi-stable switch is presented. The bi-stability is achieved by a mechanically pre-stressed toggle-lever. As bi-stability occurs only in a certain range of geometries for the given mechanical device, extensive FEM analysis (ANSYS) has been used to get a proper design of the switch and to optimise the layout for symmetrical switching behaviour, large stroke and low mechanical stress in the mechanical elements. An analytical model of the bi-stable switch has been developed which gives similar results as the FEM calculations. Switching between the bi-stable states is done electro-statically. The bi-stable switch has been realized using silicon-on-insulator (SOI) -technology. First experimental results show that such bi-stable toggle-lever switches can be utilized for direct multimode fibre switching where a stroke of about 100 mum is needed. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：451 / 459

页数：9