Simulation and realization of a novel micromechanical bi-stable switch

A new concept for a micro mechanical bi-stable switch is presented. The bi-stability is achieved by a mechanically pre-stressed toggle-lever. As bi-stability occurs only in a certain range of geometries for the given mechanical device, extensive FEM analysis (ANSYS) has been used to get a proper design of the switch and to optimise the layout for symmetrical switching behaviour, large stroke and low mechanical stress in the mechanical elements. An analytical model of the bi-stable switch has been developed which gives similar results as the FEM calculations. Switching between the bi-stable states is done electro-statically. The bi-stable switch has been realized using silicon-on-insulator (SOI) -technology. First experimental results show that such bi-stable toggle-lever switches can be utilized for direct multimode fibre switching where a stroke of about 100 mum is needed. (C) 2004 Elsevier B.V. All rights reserved.