Measurement and modeling of pulsed mode flow meter for liquids based on a single chip probe

被引：5
作者：
Bruschi, P.
Nizza, N.
Piotto, M.
机构：
[1] Dipartimento Ingn Informaz, I-56122 Pisa, Italy
[2] CNR, IEIIT Pisa, I-56122 Pisa, Italy
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2006年 / 132卷 / 01期
关键词：
flow sensor; pulsed driving; VHDL-AMS model; response time;
D O I：
10.1016/j.sna.2006.03.020
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A flow meter for liquids, based on a temperature control loop integrated on a single chip is presented. The chip is mounted on top of a miniaturized cylindrical heat sink, allowing heat exchange between the chip and the fluid. Cancellation of the fluid temperature term is obtained by means of a pulsed driving method. Results of sensor characterization performed in deionized water are compared with simulations performed by means of a VHDL-AMS model. The effectivenessof an adaptive frequency compensation network in reducing the acquisition time is demonstrated by the model. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码：188 / 194
页数：7
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