A novel design of parallel piezoelectric six-degree-of-freedom accelerometer

被引：0

作者：

Lv Huayi ^{[1
]}

Qin Lan ^{[1
]}

Liu Jun ^{[1
]}

机构：

[1] Chongqing Univ, Minist Educ, Key Lab Optoelect Technol & Syst, Chongqing 400044, Peoples R China

来源：

SIXTH INTERNATIONAL SYMPOSIUM ON PRECISION MECHANICAL MEASUREMENTS | 2013年 / 8916卷

关键词：

six-degree-of-freedom accelerometer; piezoelectric; FEM analysis;

D O I：

10.1117/12.2035847

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

According to the drawback of elastic style six-degree-of-freedom (6-DOF) accelerometer, a novel parallel piezoelectric six-degree-of-freedom accelerometer is proposed. First, the operating principle and structure of the accelerometer is presented, then the finite element model of accelerometer is established by ANSYS analysis tools, and getting some parameters, such as output charge sensitivity, resonance frequency etc. Finally, on the basis of analysis of simulation results, a conclusion can be given that cross-axis sensitivity is less than 1%. The resonance frequency is more than 5900Hz, the accelerometer has simple and rational structure and all parameters meet requirement.

引用

页数：10

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