Comparison of scanning electron and backscattered electron line scans with Monte Carlo simulations - Metrology of structural edges

被引：0
|
作者：
Frase, G
Bosse, H
HasslerGrohne, W
Reimer, L
Kohl, H
机构：
[1] PHYS TECH BUNDESANSTALT,D-38116 BRAUNSCHWEIG,GERMANY
[2] UNIV MUNSTER,INST PHYS,D-48149 MUNSTER,GERMANY
来源：
EUROPEAN JOURNAL OF CELL BIOLOGY | 1997年 / 74卷
关键词：
D O I：
暂无
中图分类号：
Q2 [细胞生物学];
学科分类号：
071009 ; 090102 ;
摘要：
引用
收藏
页码：17 / 17
页数：1
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