Comparison of scanning electron and backscattered electron line scans with Monte Carlo simulations - Metrology of structural edges

被引：0

作者：

Frase, G

Bosse, H

HasslerGrohne, W

Reimer, L

Kohl, H

机构：

[1] PHYS TECH BUNDESANSTALT,D-38116 BRAUNSCHWEIG,GERMANY

[2] UNIV MUNSTER,INST PHYS,D-48149 MUNSTER,GERMANY

来源：

EUROPEAN JOURNAL OF CELL BIOLOGY | 1997年 / 74卷

关键词：

D O I：

暂无

中图分类号：

Q2 [细胞生物学];

学科分类号：

071009 ; 090102 ;

摘要：

引用

页码：17 / 17

页数：1

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