[1] Zhejiang Univ, Inst Appl Mech, Hangzhou 310027, Zhejiang, Peoples R China
[2] Hong Kong Polytech Univ, Dept Mech Engn, Kowloon, Hong Kong, Peoples R China
[3] Zhejiang Univ, State Key Lab Silicon Mat, Dept Mat Sci & Engn, Hangzhou 310027, Zhejiang, Peoples R China
[4] Zhejiang Univ, Coll Elect Engn, Hangzhou 310027, Zhejiang, Peoples R China