Effect of Underlayer Structures on Microstructures and Magnetic Properties of Co-Rich Co-Pt Films Prepared at Ambient Temperature

被引:3
作者
Chen, Sheng-Chi [1 ,2 ]
Sun, Ta-Huang [3 ]
Wang, Chung-Hsien [1 ,2 ]
Chiou, Jie-Yang [1 ,2 ]
Chen, Shang-Tse [4 ]
Kuo, Po-Cheng [4 ]
Chen, Jiann-Ruey [3 ]
机构
[1] Ming Chi Univ Technol, Dept Mat Engn, Taipei 243, Taiwan
[2] Ming Chi Univ Technol, Ctr Thin Film Technol & Applicat, Taipei 243, Taiwan
[3] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan
[4] Natl Taiwan Univ, Inst Mat Sci & Engn, Taipei 106, Taiwan
关键词
Ag underlayer; argon pressure; Co80Pt20; nanograin; perpendicular magnetic anisotropy; PERPENDICULAR ANISOTROPY; THIN-FILMS; LAYER;
D O I
10.1109/TMAG.2013.2297731
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Granular Co-rich Co-Pt nanograins having perpendicular coercivity (Hc(perpendicular to)) of 4.0 kOe and perpendicular squareness (S-perpendicular to) of 0.75 can be achieved by depositing Co80Pt20 (25 nm) film onto Ru (30 nm)/Ag (100 nm) bilayer films using an argon pressure of 5 mTorr to deposit an Ag underlayer at ambient temperature. However, it is found that the Co80Pt20 film deposited directly onto an Ru layer without an Ag underlayer shows in-plane magnetic anisotropy. This is because an fcc Ag (111) underlayer can enhance the hcp Ru (0002) seed layer, inducing (0002) texture in the hexagonal Co80Pt20 magnetic layer, leading to the perpendicular magnetic anisotropy of Co80Pt20 films. TEM images show that granular nanograins with an average size of 8.0 nm can be observed in the Co80Pt20 magnetic layer.
引用
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页数:4
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