A study of the effect of tool cutting edge radius on ductile cutting of silicon wafers

被引:69
|
作者
Liu, K.
Li, X. P.
Rahman, M.
Neo, K. S.
Liu, X. D.
机构
[1] Singapore Inst Mfg Technol, Machining Technol Grp, Singapore 638075, Singapore
[2] Natl Univ Singapore, Dept Mech Engn, Singapore 119260, Singapore
关键词
edge radius; diamond tool; silicon wafer; ductile cutting; TRANSITION; SYSTEMS;
D O I
10.1007/s00170-005-0364-7
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
Ductile mode cutting of silicon wafers can be achieved under certain cutting conditions and tool geometry. An experimental investigation of the critical undeformed chip thickness in relation to the tool cutting edge radius for the brittle-ductile transition of chip formation in cutting of silicon wafers is presented in this paper. Experimental tests for cutting of silicon wafers using diamond tools of different cutting edge radii for a range of undeformed chip thickness are conducted on an ultra-precision lathe. Both ductile and brittle mode of chip formation processes are observed in the cutting tests. The results indicate that ductile cutting of silicon can be achieved at certain values of the undeformed chip thickness, which depends on the tool cutting edge radius. It is found that in cutting of silicon wafers with a certain tool cutting edge radius there is a critical value of undeformed chip thickness beyond which the chip formation changes from ductile mode to brittle mode. The ductile-brittle transition of chip formation varies with the tool cutting edge radius. Within the range of cutting conditions in the present study, it has also been found that the larger the cutting edge radius, the larger the critical undeformed chip thickness for the ductile-brittle transition in the chip formation.
引用
收藏
页码:631 / 637
页数:7
相关论文
共 50 条
  • [21] CBN tool wear in ductile cutting of tungsten carbide
    Liu, K
    Li, XP
    Rahman, M
    Liu, XD
    WEAR, 2003, 255 : 1344 - 1351
  • [22] Study of micro ball end mill geometry and measurement of cutting edge radius
    Baburaj, M.
    Ghosh, A.
    Shunmugam, M. S.
    PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2017, 48 : 9 - 17
  • [23] Influence of micro grooves of diamond tool on silicon cutting: a molecular dynamic study
    Liu, Changlin
    Zhang, Jianguo
    Zhang, Junjie
    Chen, Xiao
    He, Wenbin
    Xiao, Junfeng
    Xu, Jianfeng
    MOLECULAR SIMULATION, 2020, 46 (02) : 92 - 101
  • [24] Influence of Edge Preparation on Cutting Tool Wear
    Chai, Guobing
    Wang, Wei
    Yu, Aibing
    ADVANCES IN ENGINEERING DESIGN AND OPTIMIZATION III, PTS 1 AND 2, 2012, 201-202 : 1178 - 1181
  • [25] A numerical study of cutting edge radius effects on stress evolutions of diamond coated tools
    Hu J.
    Chou Y.K.
    Thompson R.G.
    International Journal of Machining and Machinability of Materials, 2010, 7 (3-4) : 149 - 160
  • [26] Effects of diamond cutting tool's rake angle and edge radius on the diamond turned surface quality
    Zhao, QL
    Dong, S
    Liang, YC
    Zhao, Y
    OPTICAL MANUFACTURING AND TESTING IV, 2001, 4451 : 202 - 208
  • [27] Study of the mechanism of nanoscale ductile mode cutting of silicon using molecular dynamics simulation
    Cai, M. B.
    Li, X. P.
    Rahman, M.
    INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 2007, 47 (01) : 75 - 80
  • [28] Effect of crystallographic orientation on wear of diamond tools for nano-scale ductile cutting of silicon
    Uddin, MS
    Seah, KHW
    Li, XP
    Rahman, M
    Liu, K
    WEAR, 2004, 257 (7-8) : 751 - 759
  • [29] On ductile-regime elliptical vibration cutting of silicon with identifying the lower bound of practicable nominal cutting velocity
    Wang, Jianjian
    Yang, Yang
    Zhu, Zhiwei
    Wang, Yaoke
    Liao, Wei-Hsin
    Guo, Ping
    JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2020, 283
  • [30] On the cracks self-healing mechanism at ductile mode cutting of silicon
    Kovalchenko, A. M.
    Milman, Yu. V.
    TRIBOLOGY INTERNATIONAL, 2014, 80 : 166 - 171