MOVPE growth of MgSe and ZnMgSe on (100)GaAs

被引:11
作者
Prete, P
Lovergine, N
Tapfer, L
Zanotti-Fregonara, C
Mancini, AM
机构
[1] CNR, Ist Studio Nuovi Mat Electtr, I-73100 Lecce, Italy
[2] Univ Lecce, Dipartimento Ingn Innovaz, I-73100 Lecce, Italy
[3] Ist Nazl Fis Mat, I-73100 Lecce, Italy
[4] CNRSM, PASTIS, I-72100 Brindisi, Italy
[5] CNR, Ist Mat Speciali, MASPEC, I-43100 Parma, Italy
关键词
MOVPE; MgSe; ZnMgSe; X-ray diffraction; cathodoluminescence;
D O I
10.1016/S0022-0248(00)00045-2
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We report on the MOVPE of MgSe and ZnMgSe on (100)GaAs. Dimethylzinc:triethylammine, ditertiarylbutylselenide and bis(methylcyclopentadienyl)magnesium were used as Zn, Se and Mg sources, respectively. MgSe and ZnMgSe layers were grown either directly on GaAs or after a thin pseudomorphic ZnSe layer. To avoid the hygroscopicity of Mg-based chalcogenides, a ZnSe capping layer was grown on some samples. The crystallographic phase of as-grown Layers was determined by both single- and double-crystal X-ray diffraction measurements. MgSe layers turned out to be mosaics made of (1 1 1)- and(1 0 0)-oriented MgSe crystals in their rocksalt phase. No signatures of the zincblend (ZB) phase was observed, irrespective of whether MgSe was grown on (1 0 0)GaAs or after the ZnSe buffer. Zn1-xMgxSe (0.07 < x < 0.45) epilayers were grown on ZnSe/(1 DO)GaAs in the ZB phase. The MOVPE solid/vapour distribution curve of ZnMgSe is presented, showing that the incorporation of ME into the ternary crystal is less efficient than Zn, a result of the smaller gas phase diffusion coefficient: of the Mg alkyl with respect to that of dimethylzinc, Five Kelvin cathodoluminescence measurements performed on ZnMgSe showed dominant deep blue near band-edge emission which shifts towards higher energies by increasing the amount of Mg. Weak self-activated bands were also observed in the spectra. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:119 / 124
页数:6
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