Inhibiting Strain-Induced Surface Roughening: Dislocation-Free Ge/Si and Ge/SiGe Core-Shell Nanowires

被引:77
作者
Goldthorpe, Irene A. [1 ]
Marshall, Ann F. [1 ]
McIntyre, Paul C. [1 ]
机构
[1] Stanford Univ, Geballe Lab Adv Mat, Stanford, CA 94305 USA
关键词
MISFIT DISLOCATIONS; SILICON NANOWIRES; OPTICAL-PROPERTIES; HETEROSTRUCTURES; SI; RELAXATION; GE; GERMANIUM; EPITAXY; GROWTH;
D O I
10.1021/nl9018148
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Elastic strain is a critical factor in engineering the electronic behavior of core-shell semiconductor nanowires and provides the driving force for undesirable surface roughening and defect formation. We demonstrate two independent strategies, chlorine surface passivation and growth of nanowires with low-energy sidewall facets, to avoid strain-induced surface roughening that promotes dislocation nucleation in group IV core-shell nanowires. Metastably strained, dislocation-free, core-shell nanowires are obtained, and axial strains are measured and compared to elasticity model predictions.
引用
收藏
页码:3715 / 3719
页数:5
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