Deposition of high-density silicon carbide coatings by fluidized-bed pyrolysis of chlorinated silane derivatives

Comparative analysis of the processes for preparation of high-density silicon carbide coatings by the fluidized-bed pyrolysis of the SiCl4 + CH4 + H-2 + Ar and CH3SiCl3 + H-2 + Ar mixtures on pyrocarboncoated zirconium carbide particles was performed. The degree of perfection of the atomic-crystalline structure of the SiC coatings and the influence of isothermal annealing on these parameters were studied by means of X-ray diffraction, neutron diffraction, metallography, and X-ray microprobe analysis.