Design and Fabrication of High Performance Resonant Micro-Mirrors using the Standard SOIMUMPs Process

被引：3

作者：

Farrugia, Russell ^{[1
]}

Portelli, Barnaby ^{[1
]}

Grech, Ivan ^{[1
]}

Micallef, Joseph ^{[1
]}

Casha, Owen ^{[1
]}

Gatt, Edward ^{[1
]}

机构：

[1] Univ Malta, Dept Microelect & Nanoelect, Msida, Malta

来源：

2020 SYMPOSIUM ON DESIGN, TEST, INTEGRATION & PACKAGING OF MEMS AND MOEMS (DTIP) | 2020年

关键词：

resonant micro-mirrors; electrostatic comb drive; laser beam scanning; air damping; dynamic deformation; MICROSCANNER;

D O I：

10.1109/dtip51112.2020.9139143

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we present the design and comparative analysis of two high frequency resonant micro-mirrors which incorporate direct and indirect electrostatic drive configurations. Innovative claims include: (1) the implementation of high fidelity fluid-structural coupled damping simulations in the design optimization process of indirect drive micro-mirrors; (2) demonstration of an optimized single-Si layer design that maximizes scanning efficiency while achieving minimal mirror dynamic deformation, delta(dyn). A total optical scan angle, 0(opt), of 37 degrees at a scanning frequency, f(s), of 25 kHz and a sinusoidal drive voltage amplitude, V-drive of 200 V is achieved by the 1 mm-diameter, D, indirect drive micro-mirror design.

引用

页数：6