Study of SU-8 reliability in wet thermal ambient for application to polymer micro-optics on VCSELs

被引：6

作者：

Reig, Benjamin ^{[1
,2
]}

Bardinal, Veronique ^{[1
,2
]}

Doucet, Jean-Baptiste ^{[1
,2
]}

Daran, Emmanuelle ^{[1
,2
]}

Camps, Thierry ^{[1
,3
]}

Aufray, Maelenn ^{[4
]}

Lamure, Alain ^{[4
]}

Tendero, Claire ^{[4
]}

机构：

[1] CNRS, LAAS, F-31400 Toulouse, France

[2] Univ Toulouse, LAAS, F-31400 Toulouse, France

[3] Univ Toulouse, LAAS, UPS, F-31400 Toulouse, France

[4] Univ Toulouse, UPS, CNRS, INPT, F-31030 Toulouse, France

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2014年 / 53卷 / 08期

关键词：

MEMS; PHOTORESIST; TECHNOLOGY; QUALITY; FAILURE; SYSTEMS; LENSES;

D O I：

10.7567/JJAP.53.08MC03

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We present experimental data on the reliability of SU-8 polymer when used as a core material for the integration of microlenses on vertical-cavity surface-emitting lasers (VCSELs). The respective effects of a hot and humid environment on structural, mechanical and optical properties of this epoxy resist are investigated. High aspect-ratio SU-8 micropillars are found to keep a good surface morphology and a stable optical transmission, as well as a good adherence on the wafer. Thermal cycling is also studied to check material stability under electro-thermal actuation in SU-8 micro-opto-electro-mechanical system (MOEMS). These results are of great importance for the collective integration of low-cost SU-8-based passive or active microlens arrays onto VCSELs wafers for optical interconnects and optical sensing applications. (C) 2014 The Japan Society of Applied Physics

引用

页数：5

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