Effects of substrate temperature on structure, thermal stability and mechanical property of a Zr-based metallic glass thin film

被引：21
作者：
Liu, S. Y. [1 ,2 ,3 ]
Cao, Q. P. [1 ,2 ,3 ]
Qian, X. [1 ,2 ,3 ]
Wang, C. [1 ,2 ,3 ]
Wang, X. D. [1 ,2 ,3 ]
Zhang, D. X. [4 ]
Hu, X. L. [4 ]
Xu, W. [5 ]
Ferry, M. [5 ]
Jiang, J. Z. [1 ,2 ,3 ]
机构：
[1] Zhejiang Univ, ICNSM, Hangzhou 310027, Zhejiang, Peoples R China
[2] Zhejiang Univ, State Key Lab Silicon Mat, Hangzhou 310027, Zhejiang, Peoples R China
[3] Zhejiang Univ, Sch Mat Sci & Engn, Lab New Struct Mat, Hangzhou 310027, Zhejiang, Peoples R China
[4] Zhejiang Univ, State Key Lab Modern Opt Instrumentat, Hangzhou 310027, Zhejiang, Peoples R China
[5] Univ New S Wales, Sch Mat Sci & Engn, Sydney, NSW 2052, Australia
来源：
THIN SOLID FILMS | 2015年 / 595卷
基金：
中国国家自然科学基金;
关键词：
Metallic glass thin film; Substrate temperature; Growth mode; Nano-mechanical property; SUPERCOOLED LIQUIDS; ALLOYS; MICROSTRUCTURE; BEHAVIOR; DEPOSITION; GROWTH; HF; NI; CO;
D O I：
10.1016/j.tsf.2015.10.049
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The effect of substrate temperature on the structure and properties of magnetron sputtered Zr-Cu-Ni-Al-Hf-Ti thin films were systematically investigated. With increasing deposition temperature from 293 K to 493 K, the films remain amorphous but their thermal stability decreases. Crystallization occurs as the substrate temperature reaches 563 K. It was demonstrated that the hardness and Young's modulus of glassy films were enhanced and fracture toughness was worsen by increasing the substrate temperature, along with generating a denser structure. Through the scaling analysis, it was revealed that all glassy films grow in an anomalous mode. These metallic glass films prepared herein exhibit extremely low roughness, less than 1 nm, high thermal stability and excellent mechanical properties, which are useful properties for their potential use for MEMS and other industry applications. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码：17 / 24
页数：8
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