A Novel CMUT-Based Resonant Biochemical Sensor Using Electrospinning Technology

被引：30

作者：

Zhao, Libo ^{[1
]}

Zhao, Yihe ^{[1
]}

Xia, Yong ^{[1
]}

Li, Zhikang ^{[1
]}

Li, Jie ^{[1
]}

Zhang, Jiawang ^{[1
]}

Wang, Jiuhong ^{[1
]}

Zhou, Xiangyang ^{[2
]}

Li, Yuanjie ^{[3
]}

Zhao, Yulong ^{[1
]}

Jiang, Zhuangde ^{[1
]}

机构：

[1] Xi An Jiao Tong Univ, Collaborat Innovat Ctr Suzhou Nano Sci & Technol, Int Joint Lab Micro Nano Mfg & Measurement Techno, State Key Lab Mfg Syst Engn,Sch Mech Engn, Xian 710049, Shaanxi, Peoples R China

[2] Beihang Univ, Sch Instrumentat Sci & Optoelect Engn, Beijing 100191, Peoples R China

[3] Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Xian 710049, Shaanxi, Peoples R China

来源：

IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS | 2019年 / 66卷 / 09期

基金：

中国国家自然科学基金;

关键词：

Capacitive micromachined ultrasonic transducer (CMUT)-based resonant biochemical sensor; electrospinning technology; impedance characteristics; resonant frequency shift; volume sensitivity; ULTRASONIC TRANSDUCER CMUT; CHEMICAL SENSOR;

D O I：

10.1109/TIE.2018.2878123

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

In this paper, a novel capacitive micromachined ultrasonic transducer (CMUT)-based resonant biochemical sensor is presented to detect SO2 with a sensitive polymer layer functionalized by electrospinning technology. The electrospinning technology is proposed as an innovative functionalization method to fabricate nano reticular polymer fibers with the diameters of 50-500 nm on the movable plates of the CMUTs. The surface topography of electrospun nanofibers and the impedance properties of functionalized CMUTs are characterized. The CMUT-based resonant biochemical sensor is packaged to detect SO2 in the experiments. Its resonant frequency shifts vary against the variation of SO2 concentration. The influences of the mixed gas flow rate are also analyzed. These show that the proposed sensor has good volume sensitivity and frequency stability.

引用

页码：7356 / 7365

页数：10

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