An Atmospheric-Pressure Waveguide Microwave Plasmatron with Power Summing in the Plasma-Formation Zone

被引:0
作者
Antonov, I. N. [1 ]
Komarov, V. V. [1 ]
Pimenov, A. N. [1 ]
机构
[1] Yuri Gagarin State Tech Univ Saratov, Saratov 410054, Russia
关键词
gas-discharge plasma; microwave irradiation; plasmatron; discharge;
D O I
10.1134/S1063785022020018
中图分类号
O59 [应用物理学];
学科分类号
摘要
The design of an atmospheric-pressure plasmatron on a rectangular waveguide with a two-sided microwave energy supply to the interaction domain is considered. It is shown that the use of two magnetron sources makes it possible to obtain a stable discharge in the plasmatron, providing a continuous input of power into the gas flow. Results of studying the operating modes of the microwave plasmatron, which prove its advantages over analogs, are presented.
引用
收藏
页码:19 / 22
页数:4
相关论文
共 11 条
[1]  
Antonov I. N., 2020, RF Patent, Patent No. 198579
[2]  
Antonov I. N., 2017, RF Patent, Patent No. 172620
[3]  
Didenko A.N., 2000, SVCh-energetika (Microwave Energy)
[4]  
Karabchevskaya O. V., 2012, P INT C PLASM PHYS P, P216
[5]  
Leon Shohet J., 2016, Encyclopedia of Plasma Technology - Two Volume Set
[6]  
[Прокопенко Александр Валерьевич Prokopenko A.V.], 2011, [Прикладная физика, Prikladnaya fizika], P64
[7]  
Smirnov B.M., 2007, PLASMA PROCESSES PLA
[8]   A novel microwave plasma reactor with a unique structure for chemical vapor deposition of diamond films [J].
Su, J. J. ;
Li, Y. F. ;
Li, X. L. ;
Yao, P. L. ;
Liu, Y. Q. ;
Ding, M. H. ;
Tang, W. Z. .
DIAMOND AND RELATED MATERIALS, 2014, 42 :28-32
[9]  
Tumanov YN., 2010, PLASMA HIGH FREQUENC
[10]  
Zherlitsin A.G., 2015, POLITEKH U, V326, P65