[1] Fudan Univ, Ctr Micronano Syst, Shanghai 200433, Peoples R China
[2] Fudan Univ, Minist Educ, Key Lab Micro & Nano Photon Struct, State Key Lab Surface Phys, Shanghai 200433, Peoples R China
[3] Fudan Univ, Collaborat Innovat Ctr Adv Microstruct, Shanghai 200433, Peoples R China
[4] Univ Kebangsaan Malaysia, Inst Microengn & Nanoelect, Bangi 43600, Selangor, Malaysia
[5] Chinese Acad Sci, Shanghai Inst Tech Phys, State Key Lab Infrared Phys, 500 Yu Tian Rd, Shanghai 200083, Peoples R China
[6] Inner Mongolia Univ, Semicond Photovolta Technol Key Lab, 235 West Univ Rd, Hohhot 010021, Inner Mongolia, Peoples R China
[7] KTH Royal Inst Technol, iPack VINN Excellence Ctr, S-16440 Stockholm, Sweden