MULTILAYERS DIAMOND-LIKE CARBON FILM WITH GERMANIUM BUFFER LAYERS BY PULSED LASER DEPOSITION

被引：9

作者：

Cheng, Y. ^{[1
]}

Lu, Y. M. ^{[1
]}

Guo, Y. L. ^{[1
]}

Huang, G. J. ^{[1
]}

Wang, S. Y. ^{[1
]}

Tian, F. T. ^{[1
]}

机构：

[1] Opto Elect Facil Wuhan Mech Coll, Wuhan 430075, Peoples R China

来源：

SURFACE REVIEW AND LETTERS | 2017年 / 24卷 / 02期

关键词：

Multilayer diamond-like carbon film; pulsed laser deposition; adhesion strength; germanium buffer layers; SILICON; TEMPERATURE; STABILITY;

D O I：

10.1142/S0218625X17500147

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Multilayer diamond-like carbon film with germanium buffer layers, which was composed of several thick DLC layers and thin germanium island "layers" and named as Ge-DLC film, was prepared on the germanium substrate by ultraviolet laser. The Ge-DLC film had almost same surface roughness as the pure DLC film. Hardness of the Ge-DLC film was above 48.1 GPa, which was almost the same as that of pure DLC film. Meanwhile, compared to the pure DLC film, the critical load of Ge-DLC film on the germanium substrate increased from 81.6mN to 143.8 mN. Moreover, Ge-DLC film on germanium substrates had no change after fastness tests. The results showed that Ge-DLC film not only kept high hardness but also had higher critical load than that of pure DLC film. Therefore, it could be used as practical protective films.

引用

页数：6